Research progress in tribo-electrochemistry and tribo-electrochemical polishing

2007年第2卷第4期

摘要

关键词

相关研究

回顶部

《机械工程前沿（英文）》 >> 2007年第2卷第4期 doi: 10.1007/s11465-007-0080-0

Research progress in tribo-electrochemistry and tribo-electrochemical polishing

School of Mechatronics Engineering, Harbin Institute of Technology, Harbin 150001, China;

发布日期： 2007-12-05

HTML8 PDF 4 收藏 0

摘要

In this paper, the status quo and recent progress in the research on tribo-electrochemistry in aqueous and non-aqueous media, respectively, are reviewed. Much more attention has been paid to the tribo-electrochemical mechanisms for the control of friction and wear. Based on a summary of the conventional polishing principles of hard and brittle materials, the tribo-electrochemical polishing method is proposed. The results of the preliminary test show that tribo-electrochemical polishing is promising to become a critical technology in the high efficient polishing and planarization of microelectronic materials.

关键词

tribo-electrochemical mechanisms ; planarization ; non-aqueous ; tribo-electrochemistry ; summary