2017年 第12卷 第1期
《机械工程前沿（英文）》 >> 2017年 第12卷 第1期 doi: 10.1007/s11465-017-0410-9
Recent advances in micro- and nano-machining technologies
1. School of Mechanical and Mining Engineering, The University of Queensland, QLD 4072, Australia.
2. Key Laboratory for Precision and Non-traditional Machining Technology of Ministry of Education, Dalian University of Technology, Dalian 116024, China
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摘要
Device miniaturization is an emerging advanced technology in the 21st century. The miniaturization of devices in different fields requires production of micro- and nano-scale components. The features of these components range from the sub-micron to a few hundred microns with high tolerance to many engineering materials. These fields mainly include optics, electronics, medicine, bio-technology, communications, and avionics. This paper reviewed the recent advances in micro- and nano-machining technologies, including micro-cutting, micro-electrical-discharge machining, laser micro-machining, and focused ion beam machining. The four machining technologies were also compared in terms of machining efficiency, workpiece materials being machined, minimum feature size, maximum aspect ratio, and surface finish.
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