正文
《化学科学与工程前沿(英文)》 >> 2016年 第10卷 第4期 doi: 10.1007/s11705-016-1598-7
Where physics meets chemistry: Thin film deposition from reactive plasmas
. School of Engineering, University of South Australia, Mawson Lakes, Australia, SA 5095. .. Future Industries Institute, University of South Australia, Mawson Lakes, Australia, SA 5095. .. Department of Electrical Engineering and Electronics, University of Liverpool, Liverpool, L69 3GJ, UK. .. Material Science Institute, Lancaster University, Lancaster, LA1 4YW, UK
摘要
关键词
thin films ; plasma physics ; plasma chemistry ; functionalization ; polymer
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