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《机械工程前沿(英文)》 >> 2007年 第2卷 第2期 doi: 10.1007/s11465-007-0023-9
Theoretical and experimental analysis on super precision grinding of monocrystal silicon
Key Laboratory for Precision & Non-traditional Machining of Ministry of Education, Dalian University of Technology, Dalian 116021, China
摘要
关键词
machining mechanism ; recovery ; advancement ; mechanism ; subsurface
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