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Frontiers of Mechanical Engineering >> 2006, Volume 1, Issue 4 doi: 10.1007/s11465-006-0050-y
Porosity model for flows in CMP
1.School of Mechanical, Electronic and Control Engineering, Beijing Jiaotong University, Beijing 100044, China; 2.State Key Laboratory of Tribology, Tsinghua University, Beijing 100084, China;
Abstract
Keywords
multilevel technique ; three-dimensional ; proportional ; research ; thicker
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