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Frontiers of Mechanical Engineering >> 2008, Volume 3, Issue 1 doi: 10.1007/s11465-008-0001-x
Micro-spectrophotometer based on micro electro-mechanical systems technology
1.Graduate School of Chinese Academy of Science; 2.Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Science;
Abstract
Keywords
mini-spectrophotometer ; referenced ; micro-silicon-fixer ; electro-mechanical ; correlation coefficient
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