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Frontiers of Mechanical Engineering >> 2021, Volume 16, Issue 2 doi: 10.1007/s11465-020-0619-x
High-bandwidth nanopositioning via active control of system resonance
. State Key Laboratory of Mechanical System and Vibration, School of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai 200240, China.. State Key Laboratory of Fluid Power and Mechatronic Systems, Zhejiang University, Hangzhou 310027, China.. The Centre for Applied Dynamics Research, School of Engineering, University of Aberdeen, Aberdeen AB24 3UE, UK.. The Shanghai Key Laboratory of Networked Manufacturing and Enterprise Information, Shanghai 200240, China
Abstract
Keywords
nanopositioning stage ; high-bandwidth ; resonant mode control ; tracking control ; integral resonant control
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