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Frontiers of Mechanical Engineering >> 2023, Volume 18, Issue 2 doi: 10.1007/s11465-023-0747-1
A bionic approach for the mechanical and electrical decoupling of an MEMS capacitive sensor in ultralow force measurement
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Keywords
micro-electro-mechanical system capacitive sensor ; bionics ; operation instability ; mechanical and electrical decoupling ; biomedical force measurement
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