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Journal Article 5

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2022 1

2015 1

2013 1

2002 1

2000 1

Keywords

accelerometer 2

Bending structure surfaces 1

Bias drift 1

Closed-loop MEMS accelerometer 1

Flexible accelerometer 1

Micro-Electro-Mechanical Systems (MEMS) 1

Micro-electro-mechanical system (MEMS) technology 1

Modulated feedback approach 1

Temperature compensation 1

Wireless non-contact measurement 1

area changeable 1

capacitance 1

error sensitivity 1

force-balanced micro accelerometer 1

frequency 1

gas pendulum characteristic 1

micro accelerometer 1

tilt sensor 1

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Dependence of error sensitivity of frequency on bias voltage in force-balanced micro accelerometer

Lili CHEN, Wu ZHOU

Frontiers of Mechanical Engineering 2013, Volume 8, Issue 2,   Pages 146-149 doi: 10.1007/s11465-013-0260-z

Abstract:

To predict more precisely the frequency of force-balanced micro accelerometer with different biasThe resonance frequency of accelerometer under closed loop control is derived according to its operationBased on the theoretical results, micro accelerometer is fabricated and tested to study the influencesdesigned parameters of structure, circuit and process error can be used to predict the frequency of accelerometer

Keywords： Micro-Electro-Mechanical Systems (MEMS)     micro accelerometer     force-balanced micro accelerometer     frequency    

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An Area Changeable Capacitive Micro-machined Accelerometer

Li Baoqing,Lu Deren,Wang Weiyuan

Strategic Study of CAE 2000, Volume 2, Issue 2,   Pages 36-40

Abstract:

In this paper, a newly developed accelerometer based on the principle of area changeable capacitanceand fixed electrodes and CB induced by boundary effect both lower the sensitivity of the accelerometerby about 20 % , and lead to a vertical effect on accelerometer that could be ignored if compared withAfter packaging in IC ceramic die under atmosphere, the accelerometer is put on avibrator to be testedThe experimental results show that the accelerometer has typical sensitivity of 58.1 mV/ (m·s<

Keywords： capacitance     accelerometer     area changeable    

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Wireless passive flexible accelerometer fabricated using micro-electro-mechanical system technology for Research Article

Chen LI, Mangu JIA, Yingping HONG, Yanan XUE, Jijun XIONG,lichen@nuc.edu.cn

Frontiers of Information Technology & Electronic Engineering 2022, Volume 23, Issue 5,   Pages 801-809 doi: 10.1631/FITEE.2100236

Abstract: The accelerometer is composed of a flexible polyimide (PI) substrate and a planar spiral inductance coilwireless transmission is used to measure the acceleration signal by changing the distance between the accelerometerCompared with other accelerometers with a lead wire, the accelerometer can prevent the lead from fallingThrough establishment of an experimental platform, when the distance between the antenna and accelerometerMoreover, the maximum error of the accelerometer was less than 0.037%.

Keywords： Bending structure surfaces     Flexible accelerometer     Micro-electro-mechanical system (MEMS) technology    

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The Pendulum Characteristic of Natural Convection Gas and the Application for Sensor

Zhang Fuxue

Strategic Study of CAE 2002, Volume 4, Issue 8,   Pages 50-53

Abstract:

It is discovered that the natural convection gas has the pendulum characteristic, so the new concept of gas pendulum is presented. In this paper, the buoyancy lift of natural convection gas is analyzed in a hermetic chamber, and given the formula between the buoyancy lift and the change of temperature. The results of experiment have shown that gas pendulum can be utilized to measure the acceleration and tilt angle as same as solid pendulum and liquid pendulum.

Keywords： gas pendulum characteristic     tilt sensor     accelerometer    

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feedback and temperature compensation approach to improve bias drift of a closed-loop MEMS capacitive accelerometer

Ming-jun MA,Zhong-he JIN,Hui-jie ZHU

Frontiers of Information Technology & Electronic Engineering 2015, Volume 16, Issue 6,   Pages 497-510 doi: 10.1631/FITEE.1400349

Abstract: The bias drift of a micro-electro-mechanical systems (MEMS) accelerometer suffers from the 1/ noise

Keywords： Bias drift     Closed-loop MEMS accelerometer     Modulated feedback approach     Temperature compensation    

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Title Author Date Type Operation

Dependence of error sensitivity of frequency on bias voltage in force-balanced micro accelerometer

Lili CHEN, Wu ZHOU

Journal Article

An Area Changeable Capacitive Micro-machined Accelerometer

Li Baoqing,Lu Deren,Wang Weiyuan

Journal Article

Wireless passive flexible accelerometer fabricated using micro-electro-mechanical system technology for

Chen LI, Mangu JIA, Yingping HONG, Yanan XUE, Jijun XIONG,lichen@nuc.edu.cn

Journal Article

The Pendulum Characteristic of Natural Convection Gas and the Application for Sensor

Zhang Fuxue

Journal Article

feedback and temperature compensation approach to improve bias drift of a closed-loop MEMS capacitive accelerometer

Ming-jun MA,Zhong-he JIN,Hui-jie ZHU

Journal Article