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Athanasios Smyrnakis, Angelos Zeniou, Kamil Awsiuk, Vassilios Constantoudis, Evangelos Gogolides
Frontiers of Chemical Science and Engineering 2019, Volume 13, Issue 3, Pages 475-484 doi: 10.1007/s11705-019-1809-0
Keywords: plasma nanoassembly etching nanodots nanopillars nanofabrication
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