PDF(2896 KB)
一种促进低温快速沉积Cu(In,Ga)Se2薄膜生长的单加热克努森蒸发源的改良设计
Yunxiang Zhang, Shuping Lin, Shiqing Cheng, Zhichao He, Zhaojing Hu, Zhiqiang Zhou, Wei Liu *, Yun Sun
工程（英文） ›› 2021, Vol. 7 ›› Issue (4) : 534-541.
PDF(2896 KB)
PDF(2896 KB)
一种促进低温快速沉积Cu(In,Ga)Se2薄膜生长的单加热克努森蒸发源的改良设计
Boosting Cu(In,Ga)Se2 Thin Film Growth in Low-Temperature Rapid-Deposition Processes: An Improved Design for the Single-Heating Knudsen Cell
在共蒸发工艺中，克努森蒸发源经常被用来生长高质量Cu(In,Ga)Se2（CIGS）薄膜。然而，在整个薄膜沉积过程中（尤其在低温工艺下），传统单加热克努森蒸发源不能使金属完全硒化，这可能是由蒸发源坩埚喷嘴处的冷凝和液滴喷射现象造成的。本文将通过热力学分析解释这一现象，同时提出了一种新型单加热克努森蒸发源来解决这一问题。与传统低温快速沉积工艺相比，新型单加热蒸发源提高了薄膜质量，并在230 nm·min–1的生长速率下，将器件相对效率提高了29%。
The Knudsen effusion cell is often used to grow high-quality Cu(In,Ga)Se2 (CIGS) thin film in coevaporation processes. However, the traditional single-heating Knudsen effusion cell cannot deliver complete metal selenides during the whole deposition process, particularly for a low-temperature deposition process, which is probably due to the condensation and droplet ejection at the nozzle of the crucible. In this study, thermodynamics analysis is conducted to decipher the reason for this phenomenon. Furthermore, a new single-heating Knudsen effusion is proposed to solve this difficult problem, which leads to an improvement in the quality of CIGS film and a relative increase in conversion efficiency of 29% at a growth rate of about 230 nm·min−1 , compared with the traditional efficiency in a lowtemperature rapid-deposition process.
Cu(In / Ga)Se2 / 克努森蒸发源 / 凝结 / 液滴喷射 / 低温
Cu(In / Ga)Se2 / Knudsen effusion cell / Condensation / Droplet ejection / Low temperature
| [1] |
Jackson P, Wuerz R, Hariskos D, Lotter E, Witte W, Powalla M. Effects of heavy alkali elements in Cu(In,Ga)Se2 solar cells with efficiencies up to 22.6%. Phys Status Solidi Rapid Res Lett 2016;10(8):583–6.
|
| [2] |
Niki S, Contreras M, Repins I, Powalla M, Kushiya K, Ishizuka S, et al. CIGS absorbers and processes. Prog Photovolt Res Appl 2010;18(6):453–66.
|
| [3] |
Herrmann D, Kratzert P, Weeke S, Zimmer M, Djordjevic-Reiss J, Hunger R, et al. CIGS module manufacturing with high deposition rates and efficiencies. In: Proceedings of the IEEE 40th Photovoltaic Specialists Conference (PVSC), 2014 Jun 8–13; Denver, CO, USA. p. 775–7.
|
| [4] |
Edoff M, Jarmar T, Nilsson NS, Wallin E, Högström D, Stolt O, et al. High Voc in (Cu,Ag)(In,Ga)Se2 solar cells. IEEE J Photovolt 2017;7(6):1789–94.
|
| [5] |
Ward JW, Mulford RNR, Bivins RL. Study of some of the parameters affecting Knudsen effusion. II. A Monte Carlo computer analysis of parameters deduced from experiment. J Chem Phys 1967;47(5):1718–23.
|
| [6] |
Hanket G, Fields SL, Elliott JR. Design and testing of pilot-scale Cu and mixedvapor Ga-In evaporation sources. In: Proceedings of the IEEE 40th Photovoltaic Specialists Conference (PVSC); 2014 Jun 8–13; Denver, CO, USA; 2014.
|
| [7] |
Zhang X, Tsuyoshi K, Yasuyoshi K, Akira Y. Growth of Ag(In,Ga)Se2 films by modified three-stage method and influence of annealing on performance of solar cells. Jpn J Appl Phys 2012;51(10):10NC05.
|
| [8] |
Hanket GM. Manufacture of large-area copper indium (gallium) diselenide thin films for photovoltaic applications [dissertation]. Newark: University of Delaware; 1999.
|
| [9] |
Zhang L, He Q, Jiang WL, Liu FF, Li CJ, Sun Y. Effects of substrate temperature on the structural and electrical properties of Cu(In,Ga)Se2 thin films. Sol Energy Mater Sol Cells 2009;93(1):114–8.
|
| [10] |
Lin S, Liu W, Zhang Y, Cheng S, Fan Y, Zhou Z, et al. Adjustment of alkali element incorporations in Cu(In,Ga)Se2 thin films with wet chemistry Mo oxide as a hosting reservoir. Sol Energy Mater Sol Cells 2018;174:16–24.
|
| [11] |
Canava B, Guillemoles JF, Vigneron J, Lincot D, Etcheberry A. Chemical elaboration of well defined Cu(In,Ga)Se2 surfaces after aqueous oxidation etching. J Phys Chem Solids 2003;64(9–10):1791–6.
|
| [12] |
Chen CH, Lin TY, Hsu CH, Wei SY, Lai CH. Comprehensive characterization of Cu-rich Cu(In,Ga)Se2 absorbers prepared by one-step sputtering process. Thin Solid Films 2013;535:122–6.
|
| [13] |
Zhang L, Liu F, Li F, He Q, Li B, Li C. Structural, optical and electrical properties of low-temperature deposition Cu(InxGa1x)Se2 thin films. Sol Energy Mater Sol Cells 2012;99:356–61.
|
| [14] |
Dwyer DJ, Schujman SB, Novak JA, Metacarpa DJ, Haldar P. Selenium flux effects on Cu(In,Ga)Se2 growth rate, and control by in-line X-ray fluorescence. In: Proceedings of the IEEE 39th Photovoltaic Specialists Conference (PVSC); 2013 Jun 16–21; Tampa, FL, USA. p. 1957–60.
|
| [15] |
Fonseca JMS, Pfohl O, Dohrn R. Development and test of a new Knudsen effusion apparatus for the measurement of low vapour pressures. J Chem Thermodyn 2011;43(12):1942–9.
|
| [16] |
Ribeiro da Silva MAV, Monte MJS, Santos LMNBF. The design, construction, and testing of a new Knudsen effusion apparatus. J Chem Thermodyn 2006;38 (6):778–87.
|
| [17] |
Petela R. Exergy of undiluted thermal radiation. Sol Energy 2003;74 (6):469–88.
|
| [18] |
Huebner WF, Markiewicz WJ. The temperature and bulk flow speed of a gas effusing or evaporating from a surface into a void after reestablishment of collisional equilibrium. Icarus 2000;148(2):594–6.
|
| [19] |
Chirila A, Guettler D, Brémaud D, Buecheler S, Verma R, Seyrling S, et al. CIGS solar cells grown by a three-stage process with different evaporation rates. In: Proceedings of the IEEE 34th Photovoltaic Specialists Conference (PVSC); 2009 Jun 7–12; Philadelphia, PA, USA. p. 812–6.
|
| [20] |
Liu Y, Li B, Lin S, Liu W, Adam J, Madsen M, et al. Numerical analysis on effects of experimental Ga grading on Cu(In,Ga)Se2 solar cell performance. J Phys Chem Solids 2018;120:190–6.
|
| [21] |
Pianezzi F, Reinhard P, Chirila˘ A, Bissig B, Nishiwaki S, Buecheler S, et al. Unveiling the effects of post-deposition treatment with different alkaline elements on the electronic properties of CIGS thin film solar cells. Phys Chem Chem Phys 2014;16(19):8843–51.
|
| [22] |
Eisenbarth T, Unold T, Caballero R, Kaufmann CA, Schock HW. Interpretation of admittance, capacitance–voltage, and current–voltage signatures in Cu(In,Ga)Se2 thin film solar cells. J Appl Phys 2010;107(3): 034509.
|
| [23] |
Siebentritt S. What limits the efficiency of chalcopyrite solar cells? Sol Energy Mater Sol Cells 2011;95(6):1471–6.
|
/
| 〈 |
|
〉 |
