测量柔性有机显示器件对水蒸气的高阻隔性，是确保其可靠性所面临的重大工程挑战。一方面，目前缺少10^-6 g·m^-2·d^-1量级的水渗透率测试手段；另一方面，目前也没有标准的超阻隔样品用于渗透率测量的校准。为了对渗透过超阻隔材料的痕量水蒸气流量进行高灵敏、短周期测量，本文将渗透模型集成至基于渗透分子动态积累、检测和抽空的高灵敏质谱测量中，从而开发出了一种具有预测功能的测量仪器。通过使用标准聚合物样品进行校准，确保了测量结果的可靠性。校准后的水蒸气渗透检测下限在10^-7g·m^-2·d^-1量级，满足超阻隔渗透的测量灵敏度要求。本文利用渗透实验数据对所开发的预测渗透模型进行了测试评估，使得利用非稳态数据预测稳态渗透率成为可能，实现在更短的时间内有效开展超阻隔测量。

The reliable operation of flexible display devices poses a significant engineering challenge regarding the metrology of high barriers against water vapor. No reliable results have been reported in the range of 10^-6 g∙(m²∙d)^-1, and there is no standard ultra-barrier for calibration. To detect trace amount of water vapor permeation through an ultra-barrier with extremely high sensitivity and a greatly reduced test period, a predictive instrument was developed by integrating permeation models into high-sensitivity mass spectrometry measurement based on dynamic accumulation, detection, and evacuation of the permeant. Detection reliability was ensured by means of calibration using a standard polymer sample. After calibration, the lower detection limit for water vapor permeation is in the range of 10^-7 g∙(m²∙d)^-1, which satisfies the ultra-barrier requirement. Predictive permeation models were developed and evaluated using experimental data so that the steady-state permeation rate can be forecasted from non-steady-state results, thus enabling effective measurement of ultra-barrier permeation within a significantly shorter test period.