基于图案化 VO2薄膜的透明热可调微波吸收器

陆振刚, 张怡蕾, 王赫岩, 夏超, 刘云菲, 豆书亮, 李垚, 谭久彬

工程（英文） ›› 2023, Vol. 29 ›› Issue (10) : 198-206.

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工程（英文） ›› 2023, Vol. 29 ›› Issue (10) : 198-206. DOI: 10.1016/j.eng.2022.10.005
研究论文
Article

基于图案化 VO2薄膜的透明热可调微波吸收器

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Transparent Thermally Tunable Microwave Absorber Prototype Based on Patterned VO2 Film

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History +

Highlight

• Transparent thermally tunable microwave absorber is proposed for the first time.

• 55.9 dB RL modulation depth at 15.06 GHz.

• Normalized optical transmittance of 84.9% at 620 nm.

• Near unity absorption.

摘要

理想的透明微波吸收器具有高光学透过率和强微波吸收能力，但是若其吸收性能固定，则会限制微波吸收器的应用。本文提出了一种基于二氧化钒(VO2)薄膜的透明热可调微波吸收器。理论计算和实验结果表明，所提出的吸波器在620 nm波长处可以实现84.9%的高光学透过率，同时通过控制温度，15.06 GHz频点处的反射损耗可在-4.257 dB到-60.179 dB范围内调谐并且在523.75 K温度时实现近1吸收。同时，仅通过调控图案化VO2薄膜的占空比即可改变实现近1吸收时的温度。所提出的基于VO2薄膜的吸波器具有组成简单，光学透过率高，微波吸收性能热可调，调制深度大，温度调节范围可控等优点，因此有望应用于可调传感器、热发射器、调制器、热成像仪、辐射热测定器和光电器件中。

Abstract

Transparent microwave absorbers that exhibit high optical transmittance and microwave absorption capability are ideal, although having a fixed absorption performance limits their applicability. Here, a simple, transparent, and thermally tunable microwave absorber is proposed, based on a patterned vanadium dioxide (VO2) film. Numerical calculations and experiments demonstrate that the proposed VO2 absorber has a high optical transmittance of 84.9% at 620 nm; its reflection loss at 15.06 GHz can be thermally tuned from -4.257 to -60.179 dB, and near-unity absorption is achieved at 523.750 K. Adjusting only the patterned VO2 film duty cycle can change the temperature of near-unity absorption. Our VO2 absorber has a simple composition, a high optical transmittance, a thermally tunable microwave absorption performance, a large modulation depth, and an adjustable temperature tuning range, making it promising for application in tunable sensors, thermal emitters, modulators, thermal imaging, bolometers, and photovoltaic devices.

关键词

可调微波吸收器 / VO2薄膜 / 光学透明 / 仅1吸收 / 大调制深度

Keywords

Tunable microwave absorber / VO2 film / Optical transparent / Near unity absorption / Large modulation depth

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陆振刚, 张怡蕾, 王赫岩. 基于图案化 VO2薄膜的透明热可调微波吸收器. Engineering. 2023, 29(10): 198-206 https://doi.org/10.1016/j.eng.2022.10.005

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We acknowledge support from the National Natural Science Foundation of China (61975046).

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