用于高密度互连的低应力TSV阵列

Binbin Jiao; Jingping Qiao; Shiqi Jia; Ruiwen Liu; Xueyong Wei; Shichang Yun; Yanmei Kong; Yuxin Ye; Xiangbin Du; Lihang Yu; Bo Cong

doi:10.1016/j.eng.2023.11.023

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工程（英文） ›› 2024, Vol. 38 ›› Issue (7) : 201-208. DOI: 10.1016/j.eng.2023.11.023

研究论文

Article

用于高密度互连的低应力TSV阵列

Binbin Jiao ^a^,^* ,
Jingping Qiao ^a^,^b ,
Shiqi Jia ^a ,
Ruiwen Liu ^a ,
Xueyong Wei ^c^,^* ,
Shichang Yun ^a ,
Yanmei Kong ^a ,
Yuxin Ye ^a ,
Xiangbin Du ^a ,
Lihang Yu ^a^,^b ,
Bo Cong ^a

作者信息 +

Low Stress TSV Arrays for High-Density Interconnection

Binbin Jiao ^a^,^* ,
Jingping Qiao ^a^,^b ,
Shiqi Jia ^a ,
Ruiwen Liu ^a ,
Xueyong Wei ^c^,^* ,
Shichang Yun ^a ,
Yanmei Kong ^a ,
Yuxin Ye ^a ,
Xiangbin Du ^a ,
Lihang Yu ^a^,^b ,
Bo Cong ^a

Author information +

History +

Abstract

In three-dimensional (3D) stacking, the thermal stress of through-silicon via (TSV) has a significant influence on chip performance and reliability, and this problem is exacerbated in high-density TSV arrays. In this study, a novel hollow tungsten TSV (W-TSV) is presented and developed. The hollow structure provides space for the release of thermal stress. Simulation results showed that the hollow W-TSV structure can release 60.3% of thermal stress within the top 2 μm from the surface, and thermal stress can be decreased to less than 20 MPa in the radial area of 3 μm. The ultra-high-density (1600 TSV∙mm⁻²) TSV array with a size of 640 × 512, a pitch of 25 μm, and an aspect ratio of 20.3 was fabricated, and the test results demonstrated that the proposed TSV has excellent electrical and reliability performances. The average resistance of the TSV was 1.21 Ω. The leakage current was 643 pA and the breakdown voltage was greater than 100 V. The resistance change is less than 2% after 100 temperature cycles from −40 to 125 °C. Raman spectroscopy showed that the maximum stress on the wafer surface caused by the hollow W-TSV was 31.02 MPa, which means that there was no keep-out zone (KOZ) caused by the TSV array. These results indicate that this structure has great potential for applications in large-array photodetectors and 3D integrated circuits.

Keywords

Thermal stress / Through-silicon via (TSV) / High-density integration

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Binbin Jiao, Jingping Qiao, Shiqi Jia. 高密度低应力硅通孔互联技术研究. Engineering. 2024, 38(7): 201-208 https://doi.org/10.1016/j.eng.2023.11.023

参考文献

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