基于同步微机械谐振器的MEMS惠更斯钟

Engineering ›› 2024, Vol. 36 ›› Issue (5) : 124 -131. DOI: 10.1016/j.eng.2023.12.013

研究论文

基于同步微机械谐振器的MEMS惠更斯钟

Xueyong Wei ^a^,^* ,
Mingke Xu ^a ,
Qiqi Yang ^a ,
Liu Xu ^a ,
Yonghong Qi ^a ,
Ziming Ren ^a ,
Juan Ren ^b^,^* ,
Ronghua Huan ^c ,
Zhuangde Jiang ^a

作者信息 +

MEMS Huygens Clock Based on Synchronized Micromechanical Resonators

Xueyong Wei ^a^,^* ,
Mingke Xu ^a ,
Qiqi Yang ^a ,
Liu Xu ^a ,
Yonghong Qi ^a ,
Ziming Ren ^a ,
Juan Ren ^b^,^* ,
Ronghua Huan ^c ,
Zhuangde Jiang ^a

Author information +

文章历史 +

Received	Accepted	Published
2022-08-21	2023-12-14
Issue Date
2024-06-14

PDF (3523K)

Abstract

With the continuous miniaturization of electronic devices, microelectromechanical system (MEMS) oscillators that can be combined with integrated circuits have attracted increasing attention. This study reports a MEMS Huygens clock based on the synchronization principle, comprising two synchronized MEMS oscillators and a frequency compensation system. The MEMS Huygens clock improved short-time stability, improving the Allan deviation by a factor of 3.73 from 19.3 to 5.17 ppb at 1 s. A frequency compensation system based on the MEMS oscillator’s temperature-frequency characteristics was developed to compensate for the frequency shift of the MEMS Huygens clock by controlling the resonator current. This effectively improved the long-term stability of the oscillator, with the Allan deviation improving by 1.6343 × 10⁵ times to 30.9 ppt at 6000 s. The power consumption for compensating both oscillators simultaneously is only 2.85 mW∙°C⁻¹. Our comprehensive solution scheme provides a novel and precise engineering solution for achieving high-precision MEMS oscillators and extends synchronization applications in MEMS.

关键词

频率稳定性 / 惠更斯钟 / 振荡器 / 同步效应

Key words

Frequency stability / Huygens clock / MEMS / Oscillator / Synchronization

引用本文

引用格式 ▾

Xueyong Wei,Mingke Xu,Qiqi Yang,Liu Xu,Yonghong Qi,Ziming Ren,Juan Ren,Ronghua Huan,Zhuangde Jiang. 基于同步微机械谐振器的MEMS惠更斯钟[J]. 工程（英文）, 2024, 36(5): 124-131 DOI:10.1016/j.eng.2023.12.013