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Xudong Fang,Chen Wu,Bian Tian,Libo Zhao,Xueyong Wei,Zhuangde Jiang.
基于第三代半导体碳化硅的压力传感器研究综述[J].
工程(英文), 2025, 52(9): 183-203 DOI:10.1016/j.eng.2024.12.036