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Hao Zhang,Jinchuan Zheng,Guiyuan Cao,Han Lin,Baohua Jia.
基于实时机器学习的亚半波长精度激光纳米加工定位识别[J].
工程(英文), 2026, 57(2): 200-209 DOI:10.1016/j.eng.2025.03.037