面向纳米制造的超衍射量子精密测量

Engineering ›› 2025, Vol. 49 ›› Issue (6) : 96 -103. DOI: 10.1016/j.eng.2025.04.010

研究论文

面向纳米制造的超衍射量子精密测量

Wenyi Ye ^a^,^b^,^c^,^d ,
Yang Li ^a^,^b^,^c ,
Lianwei Chen ^a^,^b ,
Mingbo Pu ^a^,^b^,^c^,^d ,
Zheting Meng ^a^,^b^,^c^,^d ,
Yuanjian Huang ^e ,
Hengshuo Guo ^f ,
Xiaoyin Li ^a^,^b^,^c ,
Yinghui Guo ^a^,^b^,^c^,^d ,
Xiong Li ^a^,^b^,^c^,^d ,
Yun Long ^a^,^b^,^c^,^d ,
Emmanuel Stratakis ^g^,^h ,
Xiangang Luo ^a^,^b^,^d^,^*

作者信息 +

Sub-Diffraction Limit Quantum Metrology for Nanofabrication

Wenyi Ye ^a^,^b^,^c^,^d^,^# ,
Yang Li ^a^,^b^,^c^,^# ,
Lianwei Chen ^a^,^b^,^# ,
Mingbo Pu ^a^,^b^,^c^,^d ,
Zheting Meng ^a^,^b^,^c^,^d ,
Yuanjian Huang ^e ,
Hengshuo Guo ^f ,
Xiaoyin Li ^a^,^b^,^c ,
Yinghui Guo ^a^,^b^,^c^,^d ,
Xiong Li ^a^,^b^,^c^,^d ,
Yun Long ^a^,^b^,^c^,^d ,
Emmanuel Stratakis ^g^,^h ,
Xiangang Luo ^a^,^b^,^d^,^*

Author information +

文章历史 +

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Abstract

Optical monitoring of object position and alignment with nanoscale precision is critical for ultra-precision measurement applications, such as micro/nano-fabrication, weak force sensing, and microscopic imaging. Traditional optical nanometry methods often rely on precision nanostructure fabrication, multi-beam interferometry, or complex post-processing algorithms, which can limit their practical use. In this study, we introduced a simplified and robust quantum measurement technique with an achievable resolution of 2.2 pm and an experimental demonstration of 1 nm resolution, distinguishing it from conventional interferometry, which depended on multiple reference beams. We designed a metasurface substrate with a mode-conversion function, in which an incident Gaussian beam is converted into higher-order transverse electromagnetic mode (TEM) modes. A theoretical analysis, including calculations of the Fisher information, demonstrated that the accuracy was maintained for nanoscale displacements. In conclusion, the study findings provide a new approach for precise alignment and metrology of nanofabrication and other advanced applications.

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Key words

Nanofabrication / Precision measurement / Diffraction limit / Quantum metrology

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Wenyi Ye,Yang Li,Lianwei Chen,Mingbo Pu,Zheting Meng,Yuanjian Huang,Hengshuo Guo,Xiaoyin Li,Yinghui Guo,Xiong Li,Yun Long,Emmanuel Stratakis,Xiangang Luo. 面向纳米制造的超衍射量子精密测量[J]. 工程（英文）, 2025, 49(6): 96-103 DOI:10.1016/j.eng.2025.04.010