The development and application of silicon Neutron Transmutation Doping (NTD) technology in China

中国工程科学 ›› 2009, Vol. 11 ›› Issue (4) : 95 -100.

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中国工程科学 ›› 2009, Vol. 11 ›› Issue (4) : 95 -100.

The development and application of silicon Neutron Transmutation Doping (NTD) technology in China

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The development and application of silicon Neutron Transmutation Doping (NTD) technology in China

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摘要

The research and development history of silicon Neutron Transmutation Doping (NTD) technology and its applications at home and abroad are introduced in this paper. The advantages of NTD, compared with conventional technology of doping, are narrated. The principle of NTD as well as the implementation of the main procedures related to Si NTD is explained. The market demand tendency is prospected, and the advanced measures on NTD quality control are described.

Abstract

The research and development history of silicon Neutron Transmutation Doping (NTD) technology and its applications at home and abroad are introduced in this paper. The advantages of NTD, compared with conventional technology of doping, are narrated. The principle of NTD as well as the implementation of the main procedures related to Si NTD is explained. The market demand tendency is prospected, and the advanced measures on NTD quality control are described.

关键词

monocrystal silicon / Neutron Transmutation Doing (NTD) / uniformity / doping accuracy / application / design

Key words

monocrystal silicon / Neutron Transmutation Doing (NTD) / uniformity / doping accuracy / application / design

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. The development and application of silicon Neutron Transmutation Doping (NTD) technology in China[J]. 中国工程科学, 2009, 11(4): 95-100 DOI:

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