介绍了一种大面积扫描探针显微镜。仪器采用大范围扫描与高精度微动扫描相分离、X-Y扫描与纵向检测相分离的方案，同时具备较大扫描范围和较高的分辨率，扫描重复性好，大面积扫描范围220mm×290mm×60mm，重复性2～3 μm，并可实现探针的自动逼近、光学显微镜自动聚焦和图像自动拼接。

This paper introduces a type of large scale scanning probe microscope, which adopts the scheme of the separation of large scale scanning from high precise scanning, and the separation of X - Y scanning from vertical detection. The instrument has the advantages such as good repeatability, large scanning scale as well as high resolution. The large scale scanning range is 220 mm × 290 mm × 60 mm and the repeatability is 2～3/μm. The instrument achieves the auto-feeding of the probe, the auto-focusing of the optical microscope and the auto-mosaicking of the scanning image.