文章综述微光成像的电子轰击电荷耦合器件（EBCCD）的进展。EBCCD是将像管的荧光屏以对电子灵敏的背照明、减薄CCD代替，将电子图像直接转变为视频信号，其在所有光照等级下，特别是在极低微光下的调制传递函数（MTF）、分辨力、信噪比、余辉等均优于像增强器耦合CCD（ICCD）。文中较为详细地叙述了倒像式EBCCD设计与减薄工艺，给出各种类型倒像式EBCCD像管的技术参数，分析和比较了近贴式与倒像式EBCCD与ICCD的性能，指出了EBCCD在军用夜视技术与民用技术未来发展中的地位与重要性。

The present paper reviews the recent developments of electron-bombarded charge coupled devices (EBCCD) for low-light-level imaging. The EBCCD eliminates the complicated image transfer chain associated with conventional image intensifier fibrecoupled CCD (ICCD) by integrating a thinned back-illuminated CCD directly into the vacuum of the image tube in replacement of the phosphor screen. The photoelectrons emitted from the photocathode are “proximity focusing” or “sharp focusing” directly onto the electron sensitive CCD, and the video-signal occurs. It has been shown that the EBCCD image tubes offer nearly noiseless gain, high signal to noise ratio and excellent MTF and, for this reason, are superior to conventional ICCD approaches under all light level conditions. This paper will give a detailed description on the thinned back-illuminated CCD imager design and fabrication, such as CCD chip thinning and thinned CCD backside treatment, as well as the technical parameters of different kinds of inverter type EBCCD. The performance of the proximity type EBCCD, the inverter type EBCCD and ICCD will also be compared and analyzed. Finaly, the present paper shows that these new, high performance devices of EBCCD are in an advantageous position for many applications in low-light-lev-el surveillance imaging, high energy physics and medical diagnostics.