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Journal Article 1

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2000 1

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SiGe 1

defects control 1

epitaxial silicon wafers 1

impurities behavior 1

silicon wafers 1

silicon-on-insulator (SOI) 1

surface quality 1

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Behavior of Impurities, Defects and Surface Morphology for Silicon and Silicon Based Semiconducting Materials

Tu Hailing

Strategic Study of CAE 2000, Volume 2, Issue 1,   Pages 7-17

Abstract: material systems have received strong growing interest, the manufacturing technologies and applications of SiGe

Keywords： silicon wafers     epitaxial silicon wafers     SiGe     silicon-on-insulator (SOI)     impurities behavior     defects control    

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Behavior of Impurities, Defects and Surface Morphology for Silicon and Silicon Based Semiconducting Materials

Tu Hailing

Journal Article