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Development and application prospects of piezoelectric precision driving technology
ZHAO Chunsheng, ZHANG Jiantao, ZHANG Jianhui, JIN Jiamei
Frontiers of Mechanical Engineering 2008, Volume 3, Issue 2, Pages 119-132 doi: 10.1007/s11465-008-0034-1
Keywords: Electromagnetic ultra-precision processing technology piezoelectric cumbrous
Title Author Date Type Operation