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Stiction and Friction in Micro Electro Mechanical Systems
Wang Weiyuan
Strategic Study of CAE 2000, Volume 2, Issue 3, Pages 36-41
The stiction and friction influencing the yield and reliability of MEMS are reviewed in this paper.Thestiction, called release-related stiction, can occur within micron gaps of Si microstuctures duringThe preparation technology of anti-stiction films and its problems are described.Comparing with stiction, the friction is more complex.After using anti-stiction films, the stiction is fully prevented, and even the friction is apparently
Keywords： micro electro mechanical systems stiction friction anti-stiction films wear-resisting films
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