Fabrication of Periodic Nanostructures Using AFM Tip-Based Nanomachining: Combining Groove and Material Pile-Up Topographies

Yanquan Geng, Yongda Yan, Jiqiang Wang, Emmanuel Brousseau, Yanwen Sun, Yazhou Sun

Engineering ›› 2018, Vol. 4 ›› Issue (6) : 787-795.

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PDF(2828 KB)
Engineering ›› 2018, Vol. 4 ›› Issue (6) : 787-795. DOI: 10.1016/j.eng.2018.09.010
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Research Precision Engineering—Article

Fabrication of Periodic Nanostructures Using AFM Tip-Based Nanomachining: Combining Groove and Material Pile-Up Topographies

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Abstract

This paper presents an atomic force microscopy (AFM) tip-based nanomachining method to fabricate periodic nanostructures. This method relies on combining the topography generated by machined grooves with the topography resulting from accumulated pile-up material on the side of these grooves. It is shown that controlling the distance between adjacent and parallel grooves is the key factor in ensuring the quality of the resulting nanostructures. The presented experimental data show that periodic patterns with good quality can be achieved when the feed value between adjacent scratching paths is equal to the width between the two peaks of material pile-up on the sides of a single groove. The quality of the periodicity of the obtained nanostructures is evaluated by applying one- and two-dimensional fast Fourier transform (FFT) algorithms. The ratio of the area of the peak part to the total area in the normalized amplitude–frequency characteristic diagram of the cross-section of the measured AFM image is employed to quantitatively analyze the periodic nanostructures. Finally, the optical effect induced by the use of machined periodic nanostructures for surface colorization is investigated for potential applications in the fields of anti-counterfeiting and metal sensing.

Keywords

Atomic force microscopy / Nanomachining / Periodic nanostructure / Single-crystal copper

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Yanquan Geng, Yongda Yan, Jiqiang Wang, Emmanuel Brousseau, Yanwen Sun, Yazhou Sun. Fabrication of Periodic Nanostructures Using AFM Tip-Based Nanomachining: Combining Groove and Material Pile-Up Topographies. Engineering, 2018, 4(6): 787‒795 https://doi.org/10.1016/j.eng.2018.09.010

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Acknowledgements

The authors gratefully acknowledge financial support from the National Natural Science Foundation of China (51705104, 51475108, and 51675134), the Foundation for Innovative Research Groups of the National Natural Science Foundation of China (51521003), the Key Laboratory of Micro-systems and Micro-structures Manufacturing of the Ministry of Education, Harbin Institute of Technology (2017KM005), and the National Program for Support of Top-Notch Young Professors.

Compliance with ethics guidelines

Yanquan Geng, Yongda Yan, Jiqiang Wang, Emmanuel Brousseauc, Yanwen Sun, and Yazhou Sun declare that they have no conflict of interest or financial conflicts to disclose.

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