Ultra-Short Pulsed Laser Manufacturing and Surface Processing of Microdevices

Yongchao Yu, Shi Bai, Shutong Wang, Anming Hu

Engineering ›› 2018, Vol. 4 ›› Issue (6) : 779-786.

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Engineering ›› 2018, Vol. 4 ›› Issue (6) : 779-786. DOI: 10.1016/j.eng.2018.10.004
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Research Precision Engineering—Review

Ultra-Short Pulsed Laser Manufacturing and Surface Processing of Microdevices

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Abstract

Ultra-short laser pulses possess many advantages for materials processing. Ultrafast laser has a significantly low thermal effect on the areas surrounding the focal point; therefore, it is a promising tool for micro- and submicro-sized precision processing. In addition, the nonlinear multiphoton absorption phenomenon of focused ultra-short pulses provides a promising method for the fabrication of various structures on transparent material, such as glass and transparent polymers. A laser direct writing process was applied in the fabrication of high-performance three-dimensional (3D) structured multilayer micro-supercapacitors (MSCs) on polymer substrates exhibiting a peak specific capacitance of 42.6 mF·cm−2 at a current density of 0.1 mA·cm−2. Furthermore, a flexible smart sensor array on a polymer substrate was fabricated for multi-flavor detection. Different surface treatments such as gold plating, reduced-graphene oxide (rGO) coating, and polyaniline (PANI) coating were accomplished for different measurement units. By applying principal component analysis (PCA), this sensing system showed a promising result for flavor detection. In addition, two-dimensional (2D) periodic metal nanostructures inside 3D glass microfluidic channels were developed by all-femtosecond-laser processing for real-time surface-enhanced Raman spectroscopy (SERS). The processing mechanisms included laser ablation, laser reduction, and laser-induced surface nano-engineering. These works demonstrate the attractive potential of ultra-short pulsed laser for surface precision manufacturing.

Keywords

Ultra-short pulsed laser processing / Microdevices / Supercapacitor / Electronic tongue / Surface-enhanced Raman spectroscopy

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Yongchao Yu, Shi Bai, Shutong Wang, Anming Hu. Ultra-Short Pulsed Laser Manufacturing and Surface Processing of Microdevices. Engineering, 2018, 4(6): 779‒786 https://doi.org/10.1016/j.eng.2018.10.004

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Acknowledgements

We appreciated a technical maturation grant provided by the University of Tennessee Research Foundation and a grant from the National Natural Science Foundation of China (51575016). The Fundamental Research Funds for the Central Universities also supported this work. Wang and Bai gratefully acknowledge financial support from the China Scholarship Council.

Compliance with ethics guidelines

Yongchao Yu, Shi Bai, Shutong Wang, and Anming Hu declare that they have no conflict of interest or financial conflicts to disclose.

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