Formation Mechanism of the Nanostructures and Crystallographic Features on Silicon Created by Ultrafast Laser Scanning

Xiong Zhang; Siyi Ji; Benny C.F. Cheung; Yixuan Sun; Chunming Wang; Zibin Chen; Xiaohong Zhan; Chunjin Wang

doi:10.1016/j.eng.2025.12.036

Engineering ›› :202512036 DOI: 10.1016/j.eng.2025.12.036

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Formation Mechanism of the Nanostructures and Crystallographic Features on Silicon Created by Ultrafast Laser Scanning

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Abstract

The manufacture of nanostructures on silicon (Si) has profound implications across diverse disciplines. Previous research has focused mainly on qualitative explanations based solely on evidence from electromagnetic and matter reorganization theories. This study designed experiments and explored the characteristics of nanostructures created by scanning with an ultrafast laser, in which experimental evidence supporting both electromagnetic and matter reorganization theories was simultaneously observed. Four distinct surface morphologies were identified, each with specific formation thresholds: 0.06, 0.09, 0.22, and 0.27 J ⋅ cm⁻². The polycrystalline Si that emerged at the apex of the monocrystalline Si matrix was directly characterized, and the occurrence of SiO₂ and α-Si was detailed. The simultaneous and distinct contributions of electromagnetic and reorganization theories were revealed. By examining the relationship between phase transitions and laser features, the conditions under which each mechanism operates were established. This study provides novel insights into the precise control of Si nanostructures, which could revolutionize applications in electronics, photonics, and materials science.

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Silicon / Ultrafast laser / Micro/nanostructures / Crystallographic features / Mechanism

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Xiong Zhang, Siyi Ji, Benny C.F. Cheung, Yixuan Sun, Chunming Wang, Zibin Chen, Xiaohong Zhan, Chunjin Wang. Formation Mechanism of the Nanostructures and Crystallographic Features on Silicon Created by Ultrafast Laser Scanning. Engineering 202512036 DOI:10.1016/j.eng.2025.12.036

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[1]	Raut HK, Ruan Q, Finet C, Saranathan V, Yang JKW, Fernandez JG. The height of chitinous ridges alone produces the entire structural color palette. Adv Mater Interfaces 2022; 9(35):2201419.

[2]	Jiang J, Fei W, Pu M, Chai Z, Wu Z. A facile liquid alloy wetting enhancing strategy on super-hydrophobic lotus leaves for plant-hybrid system implementation. Adv Mater Interfaces 2022; 9(17):2200516.

[3]	Shi X, Yang L, Li S, Guo Y, Zhao Z. Magnetic-field-driven switchable adhesion of NdFeB/PDMS composite with gecko-like surface. Nano Res 2023; 16(5):6840-8.

[4]	Pan LC, Hsieh SY, Chen WC, Lin FT, Lu CH, Cheng YL, et al. Self-assembly of shark scale-patterned tunable superhydrophobic/antifouling structures with visual color response. ACS Appl Mater Interfaces 2023; 15(29):35311-20.

[5]	Lee JY, Ju JE, Lee C, Won SM, Yu KJ. Novel fabrication techniques for ultra-thin silicon based flexible electronics. Int J Extreme Manuf 2024; 6(4):042005.

[6]	Saiki T, Shimada K, Ishijima A, Song H, Qi X, Okamoto Y, et al. Single-shot optical imaging with spectrum circuit bridging timescales in high-speed photography. Sci Adv 2023; 9(51):eadj8608.

[7]	Sugioka K, Cheng Y. Ultrafast lasers—reliable tools for advanced materials processing. Light Sci Appl 2014; 3(4):e149.

[8]	Shalini S, Samuel GL. Ultrafast pulse laser inscription and surface quality characterization of micro-structured silicon wafer. J Manuf Process 2021; 62:323-36.

[9]	Chanal M, Fedorov VY, Chambonneau M, Clady R, Tzortzakis S, Grojo D. Crossing the threshold of ultrafast laser writing in bulk silicon. Nat Commun 2017; 8(1):773.

[10]	Wang HM, Liu XB, Hu SQ, Chen DQ, Chen Q, Zhang C, et al. Giant acceleration of polaron transport by ultrafast laser-induced coherent phonons. Sci Adv 2023; 9(33):eadg3833.

[11]	Geng J, Yan W, Shi L, Qiu M. Surface plasmons interference nanogratings: wafer-scale laser direct structuring in seconds. Light Sci Appl 2022; 11(1):189.

[12]	Li K, Luo Z, Jiao H, Gan Z. Simultaneous synthesis and integration of nanoscale silicon by three-photon laser direct writing. Nanoscale Adv 2023; 5(5):1299-306.

[13]	Kwon J, Jun SW, Choi SI, Mao X, Kim J, Koh EK, et al. FeSe quantum dots for in vivo multiphoton biomedical imaging. Sci Adv 2019; 5(12):eaay0044.

[14]	Qin Z, Xiang H, Liu J, Zeng X. High-performance oil-water separation polytetrafluoroethylene membranes prepared by picosecond laser direct ablation and drilling. Mater Des 2019; 184:108200.

[15]	Alves-Lopes I, Almeida A, Oliveira V, Vilar R. Influence of laser surface nanotexturing on the friction behaviour of the silicon/sapphire system. Opt Laser Technol 2020; 121:105767.

[16]	Goodarzi R, Hajiesmaeilbaigi F, Bostandoost E. Self-organized fractal-like structures formation on the silicon wafer surface using the femtosecond laser pulses. Opt Lasers Eng 2020; 128:106008.

[17]	Villerius V, Kooiker H, Post J, Pei YT. Ultrashort pulsed laser ablation of stainless steels. Int J Mach Tools Manuf 2019; 138:27-35.

[18]	Nivas JJ, Amoruso S. Generation of supra-wavelength grooves in femtosecond laser surface structuring of silicon. Nanomaterials 2021; 11(1):174.

[19]	Miyagawa R, Kamibayashi D, Nakamura H, Hashida M, Zen H, Somekawa T, et al. Crystallinity in periodic nanostructure surface on Si substrates induced by near-and mid-infrared femtosecond laser irradiation. Sci Rep 2022; 12(1):20955.

[20]	Allahyari E, Nivas JJ, Avallone G, Valadan M, Singh M, Granata V, et al. Femtosecond laser surface irradiation of silicon in air: pulse repetition rate influence on crater features and surface texture. Opt Laser Technol 2020; 126:106073.

[21]	Ali A, Piatkowski P, Alnaser AS. Study on the origin and evolution of femtosecond laser-induced surface structures: LIPSS, quasi-periodic grooves, and aperiodic micro-ridges. Materials 2023; 16(6):2184.

[22]	Zhou Y, Luo G, Hu Y, Wu D, Hu C, Qu M. Femtosecond laser printing patterned nanoparticles on flexible substrate by tuning plasmon resonances via polarization modulation. Int J Mach Tools Manuf 2023; 189:104040.

[23]	Kim B, Nam HK, Ryu J, Kim YJ, Kim SW. Non-periodic nanoscale structuring of crystalline silicon surface by using ultrashort laser pulses. Appl Surf Sci 2021; 565:150595.

[24]	Kononenko TV, Sovyk DN, Kononenko VV, Konov VI. Optimization strategy for high-quality laser milling of silicon. Opt Laser Technol 2022; 150:107921.

[25]	Nivas JJ, Allahyari E, Skoulas E, Bruzzese R, Fittipaldi R, Tsibidis GD, et al. Incident angle influence on ripples and grooves produced by femtosecond laser irradiation of silicon. Appl Surf Sci 2021; 570:151150.

[26]	Kudryashov SI, Nastulyavichus AA, Saraeva IN, Rudenko AA, Zayarny DA, Ionin AA. Deeply sub-wavelength laser nanopatterning of Si surface in dielectric fluids: manipulation by surface plasmon resonance. Appl Surf Sci 2020; 519:146204.

[27]	Wang Q, Yao P, Li Y, Jiang L, Xu J, Liang S, et al. Inverted pyramid structure on monocrystalline silicon processed by wet etching after femtosecond laser machining in air and deionized water. Opt Laser Technol 2023; 157:108647.

[28]	Cao J, Shen X, Yu Z, Zheng J. Engineering the crystalline silicon surface by femtosecond laser processing in liquid: hierarchical micro/nanostructure and amorphization. Mater Chem Phys 2020; 248:122909.

[29]	Hu M, Nivas JJ, Valadan M, Fittipaldi R, Vecchione A, Bruzzese R, et al. Ultrafast laser surface irradiation of silicon: effects of repetition rate in vacuum and air. Appl Surf Sci 2022; 606:154869.

[30]	Bonse J, Gräf S. Maxwell meets marangoni—a review of theories on laser-induced periodic surface structures. Laser Photonics Rev 2020; 14(10):2000215.

[31]	Rudenko A, Abou-Saleh A, Pigeon F, Mauclair C, Garrelie F, Stoian R, et al. High-frequency periodic patterns driven by non-radiative fields coupled with Marangoni convection instabilities on laser-excited metal surfaces. Acta Mater 2020; 194:93-105.

[32]	Rapp L, Haberl B, Pickard CJ, Bradby JE, Gamaly EG, Williams JS, et al. Experimental evidence of new tetragonal polymorphs of silicon formed through ultrafast laser-induced confined microexplosion. Nat Commun 2015; 6(1):7555.

[33]	Qian W, Cai J, Xin Z, Ye Y, Dai F, Hua Y. Femtosecond laser polishing with high pulse frequency for improving performance of specialised aerospace material systems: MCrAlY coatings in thermal barrier coating system. Int J Mach Tools Manuf 2022; 182:103954.

[34]	Maragkaki S, Tsibidis GD, Haizer L, Pápa Z, Flender R, Kiss B, et al. Tailoring surface topographies on solids with Mid-IR femtosecond laser pulses. Appl Surf Sci 2023; 612:155879.

[35]	Zhang D, Liu R, Li Z. Irregular LIPSS produced on metals by single linearly polarized femtosecond laser. Int J Extreme Manuf 2022; 4(1):015102.

[36]	Pandolfi S, Brown SB, Stubley PG, Higginbotham A, Bolme CA, Lee HJ, et al. Atomistic deformation mechanism of silicon under laser-driven shock compression. Nat Commun 2022; 13(1):5535.

[37]	Park M, Gu Y, Mao X, Grigoropoulos CP, Zorba V. Mechanisms of ultrafast GHz burst fs laser ablation. Sci Adv 2023; 9(12):eadf6397.

[38]	Zhang D, Ranjan B, Tanaka T, Sugioka K. Underwater persistent bubble-assisted femtosecond laser ablation for hierarchical micro/nanostructuring. Int J Extreme Manuf 2020; 2(1):015001.

[39]	Zhang X, Liu J, Xia M, Hu Y. Laser shock peening enables 3D gradient metal structures: a case study on manufacturing self-armored hydrophobic surfaces. Int J Mach Tools Manuf 2023; 185:103993.

[40]	Arefev MI, Shugaev MV, Zhigilei LV. Kinetics of laser-induced melting of thin gold film: how slow can it get? Sci Adv 2022; 8(38):eabo2621.

[41]	Zywietz U, Evlyukhin AB, Reinhardt C, Chichkov BN. Laser printing of silicon nanoparticles with resonant optical electric and magnetic responses. Nat Commun 2014; 5(1):3402.

[42]	Michailovska KV, Indutnyi IZ, Shepeliavyi PE, Sopinskyy MV, Dan’ko VA, Tsybrii ZF, et al. Samarium-induced enhancement of SiO_x decomposition and Si nanocrystals formation. Appl Nanosci 2023; 13(7):4779-86.

[43]	Huang Y, Zeng Y, Zhang Z, Guo X, Liao M, Shou C, et al. UV-Raman scattering of thin film Si with ultrathin silicon oxide tunnel contact for high efficiency crystal silicon solar cells. Sol Energy Mater Sol Cells 2019; 192:154-60.

[44]	Tyschenko I, Zhang R, Volodin V, Popov V. Ion-beam synthesis of InSb nanocrystals at the Si/SiO₂ interface. Mater Lett 2022; 306:131027.

[45]	Wu J, Tang M, Zhao L, Zhu P, Jiang T, Zou X, et al. Ultrafast atomic view of laser-induced melting and breathing motion of metallic liquid clusters with MeV ultrafast electron diffraction. Proc Natl Acad Sci USA 2022; 119(4):e2111949119.

[46]	Zhao G, Wang G, Li Y, Wang L, Lian Y, Yu Y, et al. Femtosecond laser-induced periodic surface structures on hard and brittle materials. Sci China Technol Sci 2024; 67(1):19-36.