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期刊论文 1

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2007 1

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Research progress in tribo-electrochemistry and tribo-electrochemical polishing

ZHAI Wenjie

《机械工程前沿（英文）》 2007年 第2卷 第4期   页码 463-467 doi: 10.1007/s11465-007-0080-0

摘要： In this paper, the status quo and recent progress in the research on tribo-electrochemistry in aqueous and non-aqueous media, respectively, are reviewed. Much more attention has been paid to the tribo-electrochemical mechanisms for the control of friction and wear. Based on a summary of the conventional polishing principles of hard and brittle materials, the tribo-electrochemical polishing method is proposed. The results of the preliminary test show that tribo-electrochemical polishing is promising to become a critical technology in the high efficient polishing and planarization of microelectronic materials.

关键词： tribo-electrochemical mechanisms     planarization     non-aqueous     tribo-electrochemistry     summary    

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Research progress in tribo-electrochemistry and tribo-electrochemical polishing

ZHAI Wenjie

期刊论文