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Frontiers of Information Technology & Electronic Engineering >> 2023, Volume 24, Issue 7 doi: 10.1631/FITEE.2200255
Electronically enhancing the long-range nanopositioning accuracy of a Lorentz force actuator
哈尔滨工业大学机器人技术与系统国家重点实验室,中国哈尔滨市,150001
Abstract
Keywords
Nanopositioning ; Flexure guides ; Long range ; Voice coil motor ; Lorentz force actuator
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