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Additive direct-write microfabrication for MEMS: A review
Kwok Siong TEH
Frontiers of Mechanical Engineering 2017, Volume 12, Issue 4, Pages 490-509 doi: 10.1007/s11465-017-0484-4
Keywords: direct-write additive manufacturing microfabrication MEMS
Development of Microfabrication Techniques for Production of Analysis Chip
Wei Shoushui,Zhang Yulin,Cui Dafu
Strategic Study of CAE 2004, Volume 6, Issue 10, Pages 90-94
Keywords: analysis chip microfabrication μ-TAS
Prospects of Microsystems Research and Development
Zhong Xianxin
Strategic Study of CAE 2000, Volume 2, Issue 1, Pages 81-84
Keywords: microsystems microdomain sensing and processing nanometer measurement new materi-als microfabrication
Micro-cantilever Electric Field Sensor Driven by Electrostatic Force Article
Zhifei Han, Jun Hu, Licheng Li, Jinliang He
Engineering 2023, Volume 24, Issue 5, Pages 184-191 doi: 10.1016/j.eng.2022.06.017
Keywords: Microsensors Electric sensing devices Microfabrication Piezoresistive devices
A Pt-Bi bimetallic nanoparticle catalyst for direct electro-oxidation of formic acid in fuel cells
Shu-Hong LI, Yue ZHAO, Jian CHU, Wen-Wei LI, Han-Qing YU, Gang LIU, Yang-Chao TIAN
Frontiers of Environmental Science & Engineering 2013, Volume 7, Issue 3, Pages 388-394 doi: 10.1007/s11783-012-0475-y
Keywords: catalyst electrochemical deposition formic acid oxidation fuel cell gold wire array microfabrication
Development of Micro Selective Laser Melting: The State of the Art and Future Perspectives Review
Balasubramanian Nagarajan, Zhiheng Hu, Xu Song, Wei Zhai, Jun Wei
Engineering 2019, Volume 5, Issue 4, Pages 702-720 doi: 10.1016/j.eng.2019.07.002
Additive manufacturing (AM) is gaining traction in the manufacturing industry for the fabrication of components with complex geometries using a variety of materials. Selective laser melting (SLM) is a common AM technique that is based on powder-bed fusion (PBF) to process metals; however, it is currently focused only on the fabrication of macroscale and mesoscale components. This paper reviews the state of the art of the SLM of metallic materials at the microscale level. In comparison with the direct writing techniques that are commonly used for micro AM, micro SLM is attractive due to a number of factors, including a faster cycle time, process simplicity, and material versatility. A comprehensive evaluation of various research works and commercial systems for the fabrication of microscale parts using SLM and selective laser sintering (SLS) is conducted. In addition to identifying existing issues with SLM at the microscale, which include powder recoating, laser optics, and powder particle size, this paper details potential future directions. A detailed review of existing recoating methods in powder-bed techniques is conducted, along with a description of emerging efforts to implement dry powder dispensing methods in the AM domain. A number of secondary finishing techniques for AM components are reviewed, with a focus on implementation for microscale features and integration with micro SLM systems.
Keywords: Additive manufacturing Selective laser melting Microfabrication Hybrid processing Powder-bed recoating
Conference Date: 27 Oct 2019
Conference Place: 瑞士/巴塞尔城市
Administered by: Institute of Electrical and Electronics Engineers
Title Author Date Type Operation
Development of Microfabrication Techniques for Production of Analysis Chip
Wei Shoushui,Zhang Yulin,Cui Dafu
Journal Article
Micro-cantilever Electric Field Sensor Driven by Electrostatic Force
Zhifei Han, Jun Hu, Licheng Li, Jinliang He
Journal Article
A Pt-Bi bimetallic nanoparticle catalyst for direct electro-oxidation of formic acid in fuel cells
Shu-Hong LI, Yue ZHAO, Jian CHU, Wen-Wei LI, Han-Qing YU, Gang LIU, Yang-Chao TIAN
Journal Article
Development of Micro Selective Laser Melting: The State of the Art and Future Perspectives
Balasubramanian Nagarajan, Zhiheng Hu, Xu Song, Wei Zhai, Jun Wei
Journal Article
The Twenty Third International Conference on Miniaturized Systems for Chemistry and Life Sciences (μTAS 2019)
27 Oct 2019
Conference Information