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Research progress in tribo-electrochemistry and tribo-electrochemical polishing

ZHAI Wenjie

Frontiers of Mechanical Engineering 2007, Volume 2, Issue 4,   Pages 463-467 doi: 10.1007/s11465-007-0080-0

Abstract: tribo-electrochemical polishing is promising to become a critical technology in the high efficient polishing and planarization

Keywords： tribo-electrochemical mechanisms     planarization     non-aqueous     tribo-electrochemistry     summary    

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Research progress in tribo-electrochemistry and tribo-electrochemical polishing

ZHAI Wenjie

Journal Article