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2008年 第3卷 第4期

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《机械工程前沿（英文）》 >> 2008年 第3卷 第4期 doi: 10.1007/s11465-008-0060-z

Air-bearing position optimization based on dynamic characteristics of ultra-precision linear stages

State Key Laboratory of Numerical Manufacture & Equipment, Huazhong University of Science & Technology

发布日期： 2008-12-05
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摘要

Air-bearings are installed between the stator and the mover of ultra-precision linear stages to suppress vibration and mechanical contact. Spring-damping elements are used to emulate the complex interaction of the finite element model (FEM) developed in this paper and the system dynamic behaviors are analyzed. Through the experimental modal test, the validity and reliability of the model are proven. However, the dynamic characteristics including mode frequency, mode shape, and response amplitude are obviously changed with the position of air-bearings. The combined optimization method is used to optimize the air-bearings position. The best and worst positions are obtained using the dynamic characteristic analysis. The method can be generalized to the connection position of different components in manufacture elements and to implement the system dynamic characteristics optimization when the connection position can be changed.

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