正文
《化学科学与工程前沿(英文)》 >> 2019年 第13卷 第3期 doi: 10.1007/s11705-019-1809-0
A non-lithographic plasma nanoassembly technology for polymeric nanodot and silicon nanopillar fabrication
. Institute of Nanoscience & Nanotechnology, NCSR “Demokritos”, Ag. Paraskevi, 15341 Attica, Greece.. Department of Physics, University of Patras, 26504 Patras, Greece.. M. Smoluchowski Institute of Physics, Jagiellonian University, 30-348 Krakow, Poland
摘要
关键词
plasma ; nanoassembly ; etching ; nanodots ; nanopillars ; nanofabrication
正文