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2008 1

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Piezoelectric film-actuated motion platform with high resolution

HUA Shunming, ZHANG Hongzhuang, CHENG Guangming, FAN Zunqiang, LIU Jianfang

《机械工程前沿（英文）》 2008年 第3卷 第3期   页码 265-269 doi: 10.1007/s11465-008-0041-2

摘要： A piezoelectric film-actuated motion platform with high resolution, which can run in two directions within a horizontal plane, is presented. On the basis of the analysis of the working principle of a stick-slip mechanism, a mathematical model describing its dynamic behavior is set up and simulated. Experiments of the motion performance and carrying ability on the prototype are conducted. Results show that this type of platform has advantages including a simple structure, small volume, light weight, stable step length, and large traveling range. When the driving voltage is less than 30 V, step error is less than 0.5 ?m. The carrying ability of the platform is terrific and about 7–8 times its weight.

关键词： mathematical     stick-slip mechanism     piezoelectric film-actuated     analysis     terrific    

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Piezoelectric film-actuated motion platform with high resolution

HUA Shunming, ZHANG Hongzhuang, CHENG Guangming, FAN Zunqiang, LIU Jianfang

期刊论文