Materials Design on the Origin of Gap States in a High-κ/GaAs Interface
Weichao Wang , Cheng Gong , Ka Xiong , Santosh K.C. , Robert M. Wallace , Kyeongjae Cho
Engineering ›› 2015, Vol. 1 ›› Issue (3) : 372 -377.
Materials Design on the Origin of Gap States in a High-κ/GaAs Interface
Given the demand for constantly scaling microelectronic devices to ever smaller dimensions, a SiO2 gate dielectric was substituted with a higher dielectric-constant material, Hf(Zr)O2, in order to minimize current leakage through dielectric thin film. However, upon interfacing with high dielectric constant (high-κ) dielectrics, the electron mobility in the conventional Si channel degrades due to Coulomb scattering, surface-roughness scattering, remote-phonon scattering, and dielectric-charge trapping. III-V and Ge are two promising candidates with superior mobility over Si. Nevertheless, Hf(Zr)O2/III-V(Ge) has much more complicated interface bonding than Si-based interfaces. Successful fabrication of a high-quality device critically depends on understanding and engineering the bonding configurations at Hf(Zr)O2/III-V(Ge) interfaces for the optimal design of device interfaces. Thus, an accurate atomic insight into the interface bonding and mechanism of interface gap states formation becomes essential. Here, we utilize first-principle calculations to investigate the interface between HfO2 and GaAs. Our study shows that As−As dimer bonding, Ga partial oxidation (between 3+ and 1+) and Ga− dangling bonds constitute the major contributions to gap states. These findings provide insightful guidance for optimum interface passivation.
high-mobility device / high-κ/III-V interface / interfacial gap states / first-principle calculations
This work was supported by the National Natural Science Foundation of China (11304161, 11104148, and 51171082), the Tianjin Natural Science Foundation (13JCYBJC41100 and 14JCZDJC37700), the National Basic Research Program of China (973 Program) (2014CB931703), Specialized Research Fund for the Doctoral Program of Higher Education (20110031110034), and the Fundamental Research Funds for the Central Universities. Kyeongjae Cho was supported by the Global Frontier Center for Multiscale Energy Systems at Seoul National University in Korea.()
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