论述了超大规模集成电路与高纯水的关系以及对水质的要求；研究了高纯水制备的几个关键新技术及提高高纯水质量的方法，该方法能有效地降低高纯水中的总有机碳、细菌、细菌内毒素、溶解氧等；讨论了高纯水常用各种管材的污染，并列举了大量数据和应用实例。

In this paper, the relationship between the ultra large scale integrated circuits (ULSI) and high purity water and the demands for water quality are described.Several key new techniques of high purity water fabrication are studied. A method for improving the quality of high purity water is proposed, which can effectively decrease the concentrations of total organic carbon (TOC), bacteria and bacterial endotoxins and dissolved oxygen.The contamination of high purity water caused by various pipe materials is described.Some data and examples of author´s experiments are also included.