
分析芯片微通道制作技术进展
魏守水1、张玉林1、崔大付2
Development of Microfabrication Techniques for Production of Analysis Chip
Wei Shoushui1、 Zhang Yulin1、 Cui Dafu2
微通道制作是微分析芯片制作中的关键技术之一。就选取材料的原则,模板复制中的模具制造技术及微通道直接加工方法做了比较,提出了微流体芯片产业化的可行性方案。
Fabrication of micro-channels is a key technique for production of analysis chip. The principles of selecting material, the fabrication of mold used in molding replication and every directly fabricating methods were compared and discussed. Some available methods of microfabrication for production of analysis chip were proposed.
analysis chip / microfabrication / μ-TAS
/
〈 |
|
〉 |