介绍了硅微谐振器系统的工作原理，重点给出了一种基于新型的DDS器件AD9954的智能谐振系统设计与实现。详细分析了AD9954作为智能精密驱动源的粗细搜索两种阶段工作流程并给出与DSP器件的数字接口技术。结合实验数据和扫频曲线，得出在不同真空度环境下谐振器的两种扫频结果，并对谐振系统的工作情况给予评价。

The working principle of silicon micro-resonator system was firstly introduced. An intelligence silicon micro-resonator system design and realization was presented in focus. Its two step working flows for roughness and fineness searching and digital interface technology were analyzed in detail. Combined with experimental data and sweeping curve, two different searching results came out under different vacuum circumstance and its working performance was well evaluated.