新型PB-PSOI器件表面电场和温度分布模型研究

孙伟锋()1、高珊2、陆生礼1、陈军宁2

中国工程科学 ›› 2009, Vol. 11 ›› Issue (11) : 82-87.

PDF(948 KB)
PDF(948 KB)
中国工程科学 ›› 2009, Vol. 11 ›› Issue (11) : 82-87.

新型PB-PSOI器件表面电场和温度分布模型研究

  • 孙伟锋()1、高珊2、陆生礼1、陈军宁2

作者信息 +

Analytical models for the surface electrical field and temperature distributions of novel PB-PSOI devices

  • Sun Weifeng1、Gao Shan2、Lu Shengli1、 Chen Junning2

Author information +
History +

摘要

根据泊松方程和热扩散方程提出了新型PB-PSOI 器件漂移区的二维表面电场分布模型和温度分布模型,模型计算结果与Medici模拟结果相一致。根据所提出的模型,重点研究了埋氧化层厚度及长度对漂移区表面电场分布和温度分布的影响,最后给出了PB-PSOI 器件的埋氧化层厚度和长度的优化设计方法。

Abstract

In this paper, the 2-D analytical models for the surface electrical field and temperature distributions of PB-PSOI devices in terms of Poisson's solution and thermal diffusion solution have been suggested. The analytical results of the presented models show a good agreement with the numerical simulation results obtained by Medici. The dependences of the surface electrical field and temperature on the thickness and the length of the buried oxide have also been discussed in detail. Finally, the methods to optimize the thickness and the length of the buried oxide have been proposed to achieve the high performance of PB-PSOI devices.

关键词

PB-PSOI / 表面电场 / 温度分布 / 埋氧化层

Keywords

PB-PSOI / surface electrical field / temperature distribution / buried oxide

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导出引用
孙伟锋,高珊,陆生礼,陈军宁. 新型PB-PSOI器件表面电场和温度分布模型研究. 中国工程科学. 2009, 11(11): 82-87

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基金
江苏省自然基金资助项目(BK2008287);东南大学国家自然基金预言项目(XJ2008312)
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