在高功率准分子激光系统中，前端光束形态直接决定着系统输出的光束形态，并直接与靶物理需求密切相关。主要介绍了窄脉冲准分子激光前端光束形态控制的实验研究进展，基于散射法获得了满足系统要求的部分相干源， 直接利用三束激光脉冲堆积获得了平顶整形脉冲，并结合放大实验结果对上述实现方法进行了评价分析。

In high power excimer laser system, the shape of output laser beam from whole system is mainly determined by the front-end of laser beam, and is closely correlated to the requirement of target physics. The experimental development of the front-end laser beam shape control based on a short pulse excimer laser is described. A partial coherence scattering source satisfying requirement of system construction has been developed, and the top-hat laser shaping pulse by three pulses stacking has been obtained. Also, analysis on above methods combining experimental results is given