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Abstract
Dip-pen nanolithography is a new scanning probe lithography (SPL) technique based on atomic force microscopy (AFM), and now has made a great progress. The process of dippen lithography involves the adsorption of ink molecules on AFM tip, the formation of water meniscus, the transport of ink molecules, and diffusion of ink molecules on the substrate. More factors such as temperature, humidity, tip, scanning speed and so on will influence the process of dippen lithography. The paper analyzes in detail the mechanism of this technique, introduces synthetically the latest development, including electrochemical DPN, moremode DPN, multiple DPN, multiprobe array DPN and so on. Finally, the paper describes the characteristics and the application of DPN.
Keywords
dip-pen
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nanolithography
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atomic force microscopy
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nanofabrication
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Jiang Hongkui and Lu Shuang.
Mechanism and development of dip-pen nanolithography (DPN).
Strategic Study of CAE, 2008, 10(3): 45-51 DOI: