Micro-electro-mechanical integration system, called microsystem for short is one of forefront technologies at present. The development of microsystem technologies will advance enormously micromation, integration and intelligentize of a lot of products and devices, double the function density, information density and interlinkage density of apparatus and system, save energy and reduce wasts greatly. It has quite wide application and market prospects. The significance of MEMS and its basic theory are expounded in this paper. Performances of MEMS devices used in wireless communication are summarized, and then a proposition that MEMS technology is one of the ultimate resolutions for one-chip wireless communication equipment is concluded. The evolvement status about one-chip mechanical electronic integration microsystem for wireless communication net is introduced.