The plasma surface metallurgy technology is a method of the surface metallurgy by using low temperature plasma produced by glow or arc discharge. The double glow surface alloying process, which developed based on the plasma nitriding, is a kind of the plasma surface metallurgy technology. This process, also called as Xu-Tec/Xu-Loy process, can produce various alloys, such as nickel base alloys and high speed steels,on the surface of common carbon steels. The process has been used to develop a hacksaw blade for hand or power application. It performs as well as standard bimetal blades. Recently the double glow surface alloying process has been applied to titanium and its alloys. A wear and high temperature oxidation resistant alloy has been formed on the surfaces of Ti6A14V and TiAl.