The microsystems research and development extends into various fields including the micro electronic, micro machine, micro-optics, chemistry, biotechnology and materials, making it a multidisciplinary technology integrating various technologies and knowledges. When considering potential uses in future, microsystems technologies are still at the elementary stage. Research today is mainly centered on fundamental technologies common to various microsystems.

May be the focus of the microsystems research and development as followings： science and technology at the microdomain, new signal sensing, transmission and processing technique, nanometer measurement and operation ,new microsystem materials, microfabrication technique.