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Recent advances in micro- and nano-machining technologies
Shang GAO, Han HUANG
《机械工程前沿(英文)》 2017年 第12卷 第1期 页码 18-32 doi: 10.1007/s11465-017-0410-9
Device miniaturization is an emerging advanced technology in the 21st century. The miniaturization of devices in different fields requires production of micro- and nano-scale components. The features of these components range from the sub-micron to a few hundred microns with high tolerance to many engineering materials. These fields mainly include optics, electronics, medicine, bio-technology, communications, and avionics. This paper reviewed the recent advances in micro- and nano-machining technologies, including micro-cutting, micro-electrical-discharge machining, laser micro-machining, and focused ion beam machining. The four machining technologies were also compared in terms of machining efficiency, workpiece materials being machined, minimum feature size, maximum aspect ratio, and surface finish.
关键词: micro machining cutting electro discharge machining (EDM) laser machining focused ion beam (FIB)
虚拟化路由器中基于融合再拆分的多表压缩及快速重构机制 Article
Da-fang ZHANG,Dan CHEN,Yan-biao LI,Kun XIE,Tong SHEN
《信息与电子工程前沿(英文)》 2016年 第17卷 第12期 页码 1266-1274 doi: 10.1631/FITEE.1500499
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