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Low-k integration: Gas screening for cryogenic etching and plasma damage mitigation

Romain Chanson, Remi Dussart, Thomas Tillocher, P. Lefaucheux, Christian Dussarrat, Jean François de Marneffe

《化学科学与工程前沿(英文)》 2019年 第13卷 第3期   页码 511-516 doi: 10.1007/s11705-019-1820-5

摘要: The integration of porous organo-silicate low- materials has met a lot of technical challenges. One of the main issues is plasma-induced damage, occurring for all plasma steps involved during interconnects processing. In the present paper, we focus on porous SiOCH low- damage mitigation using cryogenic temperature so as to enable micro-capillary condensation. The aim is to protect the porous low- from plasma-induced damage and keep the -value of the material unchanged, in order to limit the RC delay of interconnexion levels while shrinking the microchip dimension. The cryogenic temperature is used to condense a gas inside the porous low- material. Then, the etching process is performed at the temperature of condensation in order to keep the condensate trapped inside the material during the etching. In the first part of this work, the condensation properties of several gases are screened, leading to a down selection of five gases. Then, their stability into the porous structure is evaluated at different temperature. Four of them are used for plasma damage mitigation comparison. Damage mitigation is effective and shows negligible damage for one of the gases at –50°C.

关键词: low-k     nanotechnology     micro-electronics     cryo-etching     plasma processing    

Direct writing of electronics based on alloy and metal (DREAM) ink: A newly emerging area and its impact

Qin ZHANG, Yi ZHENG, Jing LIU

《能源前沿(英文)》 2012年 第6卷 第4期   页码 311-340 doi: 10.1007/s11708-012-0214-x

摘要: Electronics, such as printed circuit board (PCB), transistor, radio frequency identification (RFID), organic light emitting diode (OLED), solar cells, electronic display, lab on a chip (LOC), sensor, actuator, and transducer etc. are playing increasingly important roles in people’s daily life. Conventional fabrication strategy towards integrated circuit (IC), requesting at least six working steps, generally consumes too much energy, material and water, and is not environmentally friendly. During the etching process, a large amount of raw materials have to be abandoned. Besides, lithography and microfabrication are typically carried out in “Cleanroom” which restricts the location of IC fabrication and leads to high production costs. As an alternative, the newly emerging ink-jet printing electronics are gradually shaping modern electronic industry and its related areas, owing to the invention of a series of conductive inks composed of polymer matrix, conductive fillers, solvents and additives. Nevertheless, the currently available methods also encounter some technical troubles due to the low electroconductivity, complex sythesis and sintering process of the inks. As an alternative, a fundamentally different strategy was recently proposed by the authors’ lab towards truly direct writing of electronics through introduction of a new class of conductive inks made of low melting point liquid metal or its alloy. The method has been named as direct writing of electronics based on alloy and metal (DREAM) ink. A series of functional circuits, sensors, electronic elements and devices can thus be easily written on various either soft or rigid substrates in a moment. With more and more technical progresses and fundamental discoveries being kept made along this category, it was found that a new area enabled by the DREAM ink electronics is emerging, which would have tremendous impacts on future energy and environmental sciences. In order to promote the research and development along this direction, the present paper is dedicated to draft a comprehensive picture on the DREAM ink technology by summarizing its most basic features and principles. Some important low melting point metal ink candidates, especially the room temperature liquid metals such as gallium and its alloy, were collected, listed and analyzed. The merits and demerits between conventional printed electronics and the new direct writing methods were comparatively evaluated. Important scientific issues and technical strategies to modify the DREAM ink were suggested and potential application areas were proposed. Further, digestions on the impacts of the new technology among energy, health, and environmental sciences were presented. Meanwhile, some practical challenges, such as security, environment-friendly feature, steady usability, package, etc. were summarized. It is expected that the DREAM ink technology will initiate a series of unconventional applications in modern society, and even enter into peoples’ daily life in the near future.

关键词: direct writing of electronics based on alloy and metal (DREAM) ink     direct writing of electronics     printed electronics     liquid metal ink     integrated circuit     consumer electronics     nano liquid metal    

Tailoring electrical conductivity of two dimensional nanomaterials using plasma for edge electronics:

Aswathy Vasudevan, Vasyl Shvalya, Aleksander Zidanšek, Uroš Cvelbar

《化学科学与工程前沿(英文)》 2019年 第13卷 第3期   页码 427-443 doi: 10.1007/s11705-019-1805-4

摘要: Since graphene has been discovered, two-dimensional nanomaterials have attracted attention due to their promising tunable electronic properties. The possibility of tailoring electrical conductivity at the atomic level allows creating new prospective 2D structures for energy harvesting and sensing-related applications. In this respect, one of the most successful way to manipulate the physical properties of the aforementioned materials is related to the surface modification techniques employing plasma. Moreover, plasma-gaseous chemical treatment can provide a controlled change in the bandgap, increase sensitivity and significantly improve the structural stability of material to the environment as well. This review deals with recent advances in the modification of 2D carbon nanostructures for novel ‘edge’ electronics using plasma technology and processes.

关键词: graphene     edge electronics     2D nanomaterials     plasma     electrical conductivity    

Laser sintering of Cu nanoparticles on PET polymer substrate for printed electronics at different wavelengths

Juan Carlos HERNANDEZ-CASTANEDA, Boon Keng LOK, Hongyu ZHENG

《机械工程前沿(英文)》 2020年 第15卷 第2期   页码 303-318 doi: 10.1007/s11465-019-0562-x

摘要: This study explores the feasibility of different laser systems to sinter screen-printed lines from nonconductive copper nanoparticles (Cu NPs) on polyethylene terephthalate polymer film. These materials are commonly used in manufacturing functional printed electronics for large-area applications. Here, optical and thermal characterization of the materials is conducted to identify suitable laser sources and process conditions. Direct diode (808 nm), Nd:YAG (1064 nm and second harmonic of 532 nm), and ytterbium fiber (1070 nm) lasers are explored. Optimal parameters for sintering the Cu NPs are identified for each laser system, which targets low resistivity and high processing speed. Finally, the quality of the sintered tracks is quantified, and the laser sintering mechanisms observed under different wavelengths are analyzed. Practical considerations are discussed to improve the laser sintering process of Cu NPs.

关键词: laser sintering     copper nanoparticles     printed electronics    

Multi-time scale dynamics in power electronics-dominated power systems

Xiaoming YUAN, Jiabing HU, Shijie CHENG

《机械工程前沿(英文)》 2017年 第12卷 第3期   页码 303-311 doi: 10.1007/s11465-017-0428-z

摘要:

Electric power infrastructure has recently undergone a comprehensive transformation from electromagnetics to semiconductors. Such a development is attributed to the rapid growth of power electronic converter applications in the load side to realize energy conservation and on the supply side for renewable generations and power transmissions using high voltage direct current transmission. This transformation has altered the fundamental mechanism of power system dynamics, which demands the establishment of a new theory for power system control and protection. This paper presents thoughts on a theoretical framework for the coming semiconducting power systems.

关键词: power electronics     power systems     multi-time scale dynamics     mass-spring-damping model     self-stabilizing and en-stabilizing property     multi-time scale power system stabilizer    

我国后端电子制造装备及其关键零部件发展研究

陈新 ,陈云 ,陈桪 ,吴小节

《中国工程科学》 2022年 第24卷 第4期   页码 74-84 doi: 10.15302/J-SSCAE-2022.04.008

摘要: 随着5G、高清显示、AI、超级计算以及现代军事等技术迅猛发展,如5G通信模组、服务器中央处理器(CPU)/ 图形处理器(GPU)模组、小 / 微发光二极管(mini/Micro LED)高清显示器件 / 晶圆划片与批量转移 Micro

关键词: 后端电子制造     供应链重塑     电子制造装备     多芯片器件集成     企业案例    

Take back and treatment of discarded electronics: a scientific update

Ab STEVELS, Jaco HUISMAN, Feng WANG, Jinhui LI, Boyang LI, Huabo DUAN

《环境科学与工程前沿(英文)》 2013年 第7卷 第4期   页码 475-482 doi: 10.1007/s11783-013-0538-8

摘要: This paper indicates that the performance of tack-back and treatment of electronic waste (e-waste) system can be improved substantially. This can be reached by better taking into account in a better way the big variety in material composition and potential toxicity of electrical and electronic products – from a technical, organizational and regulatory perspective. Realizing that there is no ‘one size fit for all’ and combining smart tailor made solutions with economic of sale will result in the best environmental gain/cost ratio. Several examples show how science and engineering have supported or will support this approach.

关键词: e-waste     take back     treatment     substantially    

Flexible micro flow sensor for micro aerial vehicles

Rong ZHU, Ruiyi QUE, Peng LIU

《机械工程前沿(英文)》 2017年 第12卷 第4期   页码 539-545 doi: 10.1007/s11465-017-0427-0

摘要:

This article summarizes our studies on micro flow sensors fabricated on a flexible polyimide circuit board by a low-cost hybrid process of thin-film deposition and circuit printing. The micro flow sensor has merits of flexibility, structural simplicity, easy integrability with circuits, and good sensing performance. The sensor, which adheres to an object surface, can detect the surface flow around the object. In our study, we install the fabricated micro flow sensors on micro aerial vehicles (MAVs) to detect the surface flow variation around the aircraft wing and deduce the aerodynamic parameters of the MAVs in flight. Wind tunnel experiments using the sensors integrated with the MAVs are also conducted.

关键词: micro flow sensor     flexible sensor     surface flow sensing     aerodynamic parameter     micro aerial vehicle (MAV)    

Dependence of error sensitivity of frequency on bias voltage in force-balanced micro accelerometer

Lili CHEN, Wu ZHOU

《机械工程前沿(英文)》 2013年 第8卷 第2期   页码 146-149 doi: 10.1007/s11465-013-0260-z

摘要:

To predict more precisely the frequency of force-balanced micro accelerometer with different bias voltages, the effects of bias voltages on error sensitivity of frequency is studied. The resonance frequency of accelerometer under closed loop control is derived according to its operation principle, and its error sensitivity is derived and analyzed under over etching structure according to the characteristics of Deep Reaction Ion Etching (DRIE). Based on the theoretical results, micro accelerometer is fabricated and tested to study the influences of AC bias voltage and DC bias voltage on sensitivity, respectively. Experimental results indicate that the relative errors between test data and theory data are less than 7%, and the fluctuating value of error sensitivity under the range of voltage adjustment is less than 0.01 μm . It is concluded that the error sensitivity with designed parameters of structure, circuit and process error can be used to predict the frequency of accelerometer with no need to consider the influence of bias voltage.

关键词: Micro-Electro-Mechanical Systems (MEMS)     micro accelerometer     force-balanced micro accelerometer     frequency     error sensitivity    

Numerical simulation of micro scale flowing and boiling

Wen WANG, Rui ZHUAN,

《能源前沿(英文)》 2009年 第3卷 第4期   页码 396-401 doi: 10.1007/s11708-009-0049-2

摘要: Numerical simulations of flowing and boiling in micro channels are presented, including the modeling of bubble dynamics of nucleate boiling, and a description of the interface of two phases with the volume-of-fluid (VOF). The two calculated cases are compared with related experimental data in literature. Some simulated results are found corresponding well to the experimental data. The simulated results also show the details of 3-dimensional heat transfer and the flow in micro channels, which are helpful to the investigation of the mechanism of two-phase heat transfer and flow in micro channels.

关键词: volume-of-fluid (VOF)     micro channel     nucleate boiling     bubble dynamics     simulation    

Dynamical research on spherical micro actuator with piezoelectric ceramic stacks drivers

ZHANG Ruihua, CHEN Haichu

《机械工程前沿(英文)》 2007年 第2卷 第4期   页码 433-438 doi: 10.1007/s11465-007-0074-y

摘要: This paper develops a 30 mm × 30 mm × 50 mm spherical micro actuator driven by piezoelectric ceramic stacks (PZT), and analyzes its dynamic performances. First, the space coordinate relationship of the spherical micro actuator and a dynamic model are set up. Second, The Runge-Kutta arithmetic is used to calculate the dynamical parameters of the micro actuator; the SIMULINK module of MATLAB is used to build the dynamical simulating model and then simulate it. Third, an experimental sample of the spherical micro actuator is developed, a micromanipulator is integrated with a micro-gripper based on the sample spherical micro actuator, and the experimental research on the micro assembly is conducted between a micro shaft of 180 μm and a micro spindle sleeve of 200 μm. Finally, the characteristics of the spherical micro actuator influenced by the mass of the metal sphere of the micro actuator, driving signal frequency, friction coefficient of the contact surface between the metal sphere and the friction block of the micro driving unit are analyzed. The experimental results indicate that the rotation resolution of the micro actuator reaches 0.000 1°, the rotation positioning precision reaches 0.000 5°, and the maximum working frequency is about 1200 Hz. The experimental results validate the back rotation vibration model of the spherical micro actuator. The micromanipulator integrated by the spherical micro actuator can meet the requirements of precise micro operation and assembly for micro electro mechanical systems (MEMS) or other microelements in micro degree fields.

关键词: spherical     micro-gripper     friction coefficient     dynamic     frequency    

未来在社会中用作普适电子产品生产工具的个人桌面液态金属打印机 Artical

Jun Yang,Yang Yang,Zhizhu He,Bowei Chen,Jing Liu

《工程(英文)》 2015年 第1卷 第4期   页码 506-512 doi: 10.15302/J-ENG-2015042

摘要:

就像简单地用办公打印机在纸上打印图片一样直接写出 电子产品是电子产品行业长久以来的梦想。笔者实验室已发明和论证了首台液态金属打印机的原型,为该目标的实现迈出了关键的一步。作为在不久的将来为社会制造非常实用的桌面液态金属打印机的持续努力的一部分,本项工作旨在将此技术向消费者层面推进。通过一系列针对关键技术问题的工业设计和技术优化,如工作可靠性、打印分辨率、自动控制、人机界面设计、软件、硬件和软硬件之间的整合,可制造出一台高品质的个人桌面液态金属打印机(为进行大批量工业化生产做准备)。本文解释了此打印机的基本特点和重要技术原理,并论证了为制造功能性装置(如发光二极管(LED) 显示器)的几种可能的 消费者终端用途。此液态金属打印机是一种自动的个人电子产 品生产工具,其使用简单,成本低,并具有许多潜在用途。本文论证了这种新设备对一些新兴需求可能发挥的重要作用,概述了这项尖端技术的远景,并与几种传统打印方法进行了对比分析。可以预见,在不久的将来,这种桌面液态金属打印机将在学术领域、工业、教育和个人用户中成为基本的电子产品生 产工具,并会被用于许多新兴实践中。

关键词: 液态金属打印机     打印电子产品     增材制造     创客     自己动手做(DIY) 电子产品     普适技术    

Laboratory assessment of Alaska aggregates using Micro-Deval test

Jenny LIU,Sheng ZHAO,Anthony MULLIN

《结构与土木工程前沿(英文)》 2017年 第11卷 第1期   页码 27-34 doi: 10.1007/s11709-016-0359-5

摘要: Aggregates suitable for use in asphalt concrete (AC) pavement construction must meet durability criteria. Thus, it is critical to select appropriate tests to properly characterize aggregate durability. In Alaska, durability tests currently being used for aggregates in AC pavement include Los Angeles (LA) abrasion test, sulfate soundness test and Washington degradation test. However, there have long been concerns arising over Washington degradation test used as an acceptance tool, motivating pavement practitioners to seek more suitable alternatives. This paper presents a study to investigate the feasibility of using Micro-Deval test, commonly used in other states, to evaluate the durability of Alaskan aggregates in AC pavement as well as its potential to replace Washington degradation test. Micro-Deval test, Washington degradation test and other tests currently specified in Alaska were conducted on aggregates from 16 batches representing statewide sources. Based on the testing results, it is found that using Micro-Deval test for durability assessment of Alaska aggregates was feasible and reproducible, and a high potential was revealed to use Micro-Deval test to replace Washington degradation test in Alaska. It is recommended that Micro-Deval test be considered as an additional test for a certain period, but in the long run should be used along with current LA abrasion and sulfate soundness tests to provide a more desirable durability assessment of Alaska aggregates used in AC pavement.

关键词: aggregate durability     Washington degradation test     Micro-Deval test    

中国工程科技信息与电子领域2035技术预见研究

安达,李梦男,许守任,陶利,梁智昊

《中国工程科学》 2017年 第19卷 第1期   页码 50-56 doi: 10.15302/J-SSCAE-2017.01.008

摘要:

为当前最具创新性、融合性和前沿性的科技领域之一,信息与电子领域近年来发展迅速,且对很多领域都产生着深刻的影响,因此,做好该领域的技术预见工作尤为重要。本文依托“中国工程科技2035发展战略研究”项目,对信息与电子领域进行了两轮德尔菲法技术预见调查,用不同的方法筛选出更值得关注的关键应用技术、重要通用技术和潜在颠覆性技术,并针对“大数据技术”“先进计算技术”和“天地一体化信息网络技术”等重要技术项在两轮调查结论上的不同之处进行了对比。本文结论可为我国2035工程科技发展计划重要技术方向部署和我国未来技术预见提供参考依据。

关键词: 信息与电子     德尔菲法     技术预见     工程科技     调查研究    

Characterization of micro-mixing in a novel impinging streams reactor

Hui HU, Zhiming CHEN, Zhen JIAO

《化学科学与工程前沿(英文)》 2009年 第3卷 第1期   页码 58-64 doi: 10.1007/s11705-009-0106-8

摘要: This paper presents an experimental investigation of a novel impinging stream reactor (ISR) with the aim of high mixing intensity. The integral mixing quality in the reactor was measured with the iodide-iodate reaction and showed excellent mixing performance. The impact of the operating parameters, such as fluxes, circulation and inter-nozzle distances, was investigated in terms of segregation index. The results showed that the increase of flux, the decrease of inter-nozzle distance and a suitable circulation can improve the micro-mixing efficiency. Based on turbulence theory, it was estimated that the characteristic micro-mixing time was 0.002—0.02 s, which was much shorter than that in the stirred tank reactor. The micro-mixing time was related to the segregation index, which was in good agreement with those in the literature.

关键词: micro-mixing     impinging streams reactor     turbulent mixing     mass transfer    

标题 作者 时间 类型 操作

Low-k integration: Gas screening for cryogenic etching and plasma damage mitigation

Romain Chanson, Remi Dussart, Thomas Tillocher, P. Lefaucheux, Christian Dussarrat, Jean François de Marneffe

期刊论文

Direct writing of electronics based on alloy and metal (DREAM) ink: A newly emerging area and its impact

Qin ZHANG, Yi ZHENG, Jing LIU

期刊论文

Tailoring electrical conductivity of two dimensional nanomaterials using plasma for edge electronics:

Aswathy Vasudevan, Vasyl Shvalya, Aleksander Zidanšek, Uroš Cvelbar

期刊论文

Laser sintering of Cu nanoparticles on PET polymer substrate for printed electronics at different wavelengths

Juan Carlos HERNANDEZ-CASTANEDA, Boon Keng LOK, Hongyu ZHENG

期刊论文

Multi-time scale dynamics in power electronics-dominated power systems

Xiaoming YUAN, Jiabing HU, Shijie CHENG

期刊论文

我国后端电子制造装备及其关键零部件发展研究

陈新 ,陈云 ,陈桪 ,吴小节

期刊论文

Take back and treatment of discarded electronics: a scientific update

Ab STEVELS, Jaco HUISMAN, Feng WANG, Jinhui LI, Boyang LI, Huabo DUAN

期刊论文

Flexible micro flow sensor for micro aerial vehicles

Rong ZHU, Ruiyi QUE, Peng LIU

期刊论文

Dependence of error sensitivity of frequency on bias voltage in force-balanced micro accelerometer

Lili CHEN, Wu ZHOU

期刊论文

Numerical simulation of micro scale flowing and boiling

Wen WANG, Rui ZHUAN,

期刊论文

Dynamical research on spherical micro actuator with piezoelectric ceramic stacks drivers

ZHANG Ruihua, CHEN Haichu

期刊论文

未来在社会中用作普适电子产品生产工具的个人桌面液态金属打印机

Jun Yang,Yang Yang,Zhizhu He,Bowei Chen,Jing Liu

期刊论文

Laboratory assessment of Alaska aggregates using Micro-Deval test

Jenny LIU,Sheng ZHAO,Anthony MULLIN

期刊论文

中国工程科技信息与电子领域2035技术预见研究

安达,李梦男,许守任,陶利,梁智昊

期刊论文

Characterization of micro-mixing in a novel impinging streams reactor

Hui HU, Zhiming CHEN, Zhen JIAO

期刊论文