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Low-k integration: Gas screening for cryogenic etching and plasma damage mitigation
Romain Chanson, Remi Dussart, Thomas Tillocher, P. Lefaucheux, Christian Dussarrat, Jean François de Marneffe
《化学科学与工程前沿(英文)》 2019年 第13卷 第3期 页码 511-516 doi: 10.1007/s11705-019-1820-5
关键词: low-k nanotechnology micro-electronics cryo-etching plasma processing
Qin ZHANG, Yi ZHENG, Jing LIU
《能源前沿(英文)》 2012年 第6卷 第4期 页码 311-340 doi: 10.1007/s11708-012-0214-x
关键词: direct writing of electronics based on alloy and metal (DREAM) ink direct writing of electronics printed electronics liquid metal ink integrated circuit consumer electronics nano liquid metal
Aswathy Vasudevan, Vasyl Shvalya, Aleksander Zidanšek, Uroš Cvelbar
《化学科学与工程前沿(英文)》 2019年 第13卷 第3期 页码 427-443 doi: 10.1007/s11705-019-1805-4
关键词: graphene edge electronics 2D nanomaterials plasma electrical conductivity
Juan Carlos HERNANDEZ-CASTANEDA, Boon Keng LOK, Hongyu ZHENG
《机械工程前沿(英文)》 2020年 第15卷 第2期 页码 303-318 doi: 10.1007/s11465-019-0562-x
关键词: laser sintering copper nanoparticles printed electronics
Multi-time scale dynamics in power electronics-dominated power systems
Xiaoming YUAN, Jiabing HU, Shijie CHENG
《机械工程前沿(英文)》 2017年 第12卷 第3期 页码 303-311 doi: 10.1007/s11465-017-0428-z
Electric power infrastructure has recently undergone a comprehensive transformation from electromagnetics to semiconductors. Such a development is attributed to the rapid growth of power electronic converter applications in the load side to realize energy conservation and on the supply side for renewable generations and power transmissions using high voltage direct current transmission. This transformation has altered the fundamental mechanism of power system dynamics, which demands the establishment of a new theory for power system control and protection. This paper presents thoughts on a theoretical framework for the coming semiconducting power systems.
关键词: power electronics power systems multi-time scale dynamics mass-spring-damping model self-stabilizing and en-stabilizing property multi-time scale power system stabilizer
陈新 ,陈云 ,陈桪 ,吴小节
《中国工程科学》 2022年 第24卷 第4期 页码 74-84 doi: 10.15302/J-SSCAE-2022.04.008
关键词: 后端电子制造 供应链重塑 电子制造装备 多芯片器件集成 企业案例
Take back and treatment of discarded electronics: a scientific update
Ab STEVELS, Jaco HUISMAN, Feng WANG, Jinhui LI, Boyang LI, Huabo DUAN
《环境科学与工程前沿(英文)》 2013年 第7卷 第4期 页码 475-482 doi: 10.1007/s11783-013-0538-8
Flexible micro flow sensor for micro aerial vehicles
Rong ZHU, Ruiyi QUE, Peng LIU
《机械工程前沿(英文)》 2017年 第12卷 第4期 页码 539-545 doi: 10.1007/s11465-017-0427-0
This article summarizes our studies on micro flow sensors fabricated on a flexible polyimide circuit board by a low-cost hybrid process of thin-film deposition and circuit printing. The micro flow sensor has merits of flexibility, structural simplicity, easy integrability with circuits, and good sensing performance. The sensor, which adheres to an object surface, can detect the surface flow around the object. In our study, we install the fabricated micro flow sensors on micro aerial vehicles (MAVs) to detect the surface flow variation around the aircraft wing and deduce the aerodynamic parameters of the MAVs in flight. Wind tunnel experiments using the sensors integrated with the MAVs are also conducted.
关键词: micro flow sensor flexible sensor surface flow sensing aerodynamic parameter micro aerial vehicle (MAV)
Dependence of error sensitivity of frequency on bias voltage in force-balanced micro accelerometer
Lili CHEN, Wu ZHOU
《机械工程前沿(英文)》 2013年 第8卷 第2期 页码 146-149 doi: 10.1007/s11465-013-0260-z
To predict more precisely the frequency of force-balanced micro accelerometer with different bias voltages, the effects of bias voltages on error sensitivity of frequency is studied. The resonance frequency of accelerometer under closed loop control is derived according to its operation principle, and its error sensitivity is derived and analyzed under over etching structure according to the characteristics of Deep Reaction Ion Etching (DRIE). Based on the theoretical results, micro accelerometer is fabricated and tested to study the influences of AC bias voltage and DC bias voltage on sensitivity, respectively. Experimental results indicate that the relative errors between test data and theory data are less than 7%, and the fluctuating value of error sensitivity under the range of voltage adjustment is less than 0.01 μm . It is concluded that the error sensitivity with designed parameters of structure, circuit and process error can be used to predict the frequency of accelerometer with no need to consider the influence of bias voltage.
关键词: Micro-Electro-Mechanical Systems (MEMS) micro accelerometer force-balanced micro accelerometer frequency error sensitivity
Numerical simulation of micro scale flowing and boiling
Wen WANG, Rui ZHUAN,
《能源前沿(英文)》 2009年 第3卷 第4期 页码 396-401 doi: 10.1007/s11708-009-0049-2
关键词: volume-of-fluid (VOF) micro channel nucleate boiling bubble dynamics simulation
Dynamical research on spherical micro actuator with piezoelectric ceramic stacks drivers
ZHANG Ruihua, CHEN Haichu
《机械工程前沿(英文)》 2007年 第2卷 第4期 页码 433-438 doi: 10.1007/s11465-007-0074-y
关键词: spherical micro-gripper friction coefficient dynamic frequency
未来在社会中用作普适电子产品生产工具的个人桌面液态金属打印机 Artical
Jun Yang,Yang Yang,Zhizhu He,Bowei Chen,Jing Liu
《工程(英文)》 2015年 第1卷 第4期 页码 506-512 doi: 10.15302/J-ENG-2015042
就像简单地用办公打印机在纸上打印图片一样直接写出 电子产品是电子产品行业长久以来的梦想。笔者实验室已发明和论证了首台液态金属打印机的原型,为该目标的实现迈出了关键的一步。作为在不久的将来为社会制造非常实用的桌面液态金属打印机的持续努力的一部分,本项工作旨在将此技术向消费者层面推进。通过一系列针对关键技术问题的工业设计和技术优化,如工作可靠性、打印分辨率、自动控制、人机界面设计、软件、硬件和软硬件之间的整合,可制造出一台高品质的个人桌面液态金属打印机(为进行大批量工业化生产做准备)。本文解释了此打印机的基本特点和重要技术原理,并论证了为制造功能性装置(如发光二极管(LED) 显示器)的几种可能的 消费者终端用途。此液态金属打印机是一种自动的个人电子产 品生产工具,其使用简单,成本低,并具有许多潜在用途。本文论证了这种新设备对一些新兴需求可能发挥的重要作用,概述了这项尖端技术的远景,并与几种传统打印方法进行了对比分析。可以预见,在不久的将来,这种桌面液态金属打印机将在学术领域、工业、教育和个人用户中成为基本的电子产品生 产工具,并会被用于许多新兴实践中。
Laboratory assessment of Alaska aggregates using Micro-Deval test
Jenny LIU,Sheng ZHAO,Anthony MULLIN
《结构与土木工程前沿(英文)》 2017年 第11卷 第1期 页码 27-34 doi: 10.1007/s11709-016-0359-5
关键词: aggregate durability Washington degradation test Micro-Deval test
安达,李梦男,许守任,陶利,梁智昊
《中国工程科学》 2017年 第19卷 第1期 页码 50-56 doi: 10.15302/J-SSCAE-2017.01.008
为当前最具创新性、融合性和前沿性的科技领域之一,信息与电子领域近年来发展迅速,且对很多领域都产生着深刻的影响,因此,做好该领域的技术预见工作尤为重要。本文依托“中国工程科技2035发展战略研究”项目,对信息与电子领域进行了两轮德尔菲法技术预见调查,用不同的方法筛选出更值得关注的关键应用技术、重要通用技术和潜在颠覆性技术,并针对“大数据技术”“先进计算技术”和“天地一体化信息网络技术”等重要技术项在两轮调查结论上的不同之处进行了对比。本文结论可为我国2035工程科技发展计划重要技术方向部署和我国未来技术预见提供参考依据。
Characterization of micro-mixing in a novel impinging streams reactor
Hui HU, Zhiming CHEN, Zhen JIAO
《化学科学与工程前沿(英文)》 2009年 第3卷 第1期 页码 58-64 doi: 10.1007/s11705-009-0106-8
关键词: micro-mixing impinging streams reactor turbulent mixing mass transfer
标题 作者 时间 类型 操作
Low-k integration: Gas screening for cryogenic etching and plasma damage mitigation
Romain Chanson, Remi Dussart, Thomas Tillocher, P. Lefaucheux, Christian Dussarrat, Jean François de Marneffe
期刊论文
Direct writing of electronics based on alloy and metal (DREAM) ink: A newly emerging area and its impact
Qin ZHANG, Yi ZHENG, Jing LIU
期刊论文
Tailoring electrical conductivity of two dimensional nanomaterials using plasma for edge electronics:
Aswathy Vasudevan, Vasyl Shvalya, Aleksander Zidanšek, Uroš Cvelbar
期刊论文
Laser sintering of Cu nanoparticles on PET polymer substrate for printed electronics at different wavelengths
Juan Carlos HERNANDEZ-CASTANEDA, Boon Keng LOK, Hongyu ZHENG
期刊论文
Multi-time scale dynamics in power electronics-dominated power systems
Xiaoming YUAN, Jiabing HU, Shijie CHENG
期刊论文
Take back and treatment of discarded electronics: a scientific update
Ab STEVELS, Jaco HUISMAN, Feng WANG, Jinhui LI, Boyang LI, Huabo DUAN
期刊论文
Dependence of error sensitivity of frequency on bias voltage in force-balanced micro accelerometer
Lili CHEN, Wu ZHOU
期刊论文
Dynamical research on spherical micro actuator with piezoelectric ceramic stacks drivers
ZHANG Ruihua, CHEN Haichu
期刊论文
Laboratory assessment of Alaska aggregates using Micro-Deval test
Jenny LIU,Sheng ZHAO,Anthony MULLIN
期刊论文