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期刊论文 2

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2015 2

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Eddy current measurement of the thickness of top Cu film of the multilayer interconnects in the integrated circuit (IC) manufacturing process

Zilian QU,Yonggang MENG,Qian ZHAO

《机械工程前沿（英文）》 2015年第10卷第1期页码 1-6 doi: 10.1007/s11465-015-0325-2

摘要：

This paper proposes a new eddy current method, named equivalent unit method (EUM), for the thickness measurement of the top copper film of multilayer interconnects in the chemical mechanical polishing (CMP) process, which is an important step in the integrated circuit (IC) manufacturing. The influence of the underneath circuit layers on the eddy current is modeled and treated as an equivalent film thickness. By subtracting this equivalent film component, the accuracy of the thickness measurement of the top copper layer with an eddy current sensor is improved and the absolute error is 3 nm for sampler measurement.

关键词： CMP eddy current multilayer wafer Cu interconnects equivalent unit

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Research on Multidimensional Connotations of Megaproject Construction Organization Citizenship Behavior

Qing-hua He,De-lei Yang,Yong-kui Li,Lan Luo

《工程管理前沿（英文）》 2015年第2卷第2期页码 148-153 doi: 10.15302/J-FEM-2015024

摘要： Based on a literature review and the context characteristics of construction megaprojects (CMPs), a multidimensional connotation model of CMP citizenship behavior was proposed, including definitions, actors, and dimensions. Organizational citizenship behavior includes Cooperation Behavior (CoB), Collaboration Behavior (ClB), Innovation Behavior (IB), Voice Behavior (VB),Conscientiousness & Dedication Behavior (CDB), Benefit Defense Behavior (BDB) and Guanxi (Relations) Maintenance Behavior (GMB). Actors were divided into three levels that were project managers (individual), participant agents (group) and project organization (network).

关键词： construction megaproject (CMP) organizational citizenship behavior connotation grounded theory