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Recent advancements in optical microstructure fabrication through glass molding process
Tianfeng ZHOU,Xiaohua LIU,Zhiqiang LIANG,Yang LIU,Jiaqing XIE,Xibin WANG
《机械工程前沿（英文）》 2017年 第12卷 第1期 页码 46-65 doi: 10.1007/s11465-017-0425-2
Optical microstructures are increasingly applied in several fields, such as optical systems, precision measurement, and microfluid chips. Microstructures include microgrooves, microprisms, and microlenses. This paper presents an overview of optical microstructure fabrication through glass molding and highlights the applications of optical microstructures in mold fabrication and glass molding. The glass-mold interface friction and adhesion are also discussed. Moreover, the latest advancements in glass molding technologies are detailed, including new mold materials and their fabrication methods, viscoelastic constitutive modeling of glass, and microstructure molding process, as well as ultrasonic vibration-assisted molding technology.
关键词： optical microstructure microgroove microlens glass molding process single-point diamond cutting
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