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Review of self-referenced measurement algorithms: Bridging lateral shearing interferometry and multi-probe

Dede ZHAI, Shanyong CHEN, Ziqiang YIN, Shengyi LI

《机械工程前沿（英文）》 2017年第12卷第2期页码 143-157 doi: 10.1007/s11465-017-0432-3

摘要：

With the development of new materials and ultra-precision processing technology, the sizes of measured objects increase, and the requirements for machining accuracy and surface quality become more exacting. The traditional measurement method based on reference datum is inadequate for measuring a high-precision object when the quality of the reference datum is approximately within the same order as that of the object. Self-referenced measurement techniques provide an effective means when the direct reference-based method cannot satisfy the required measurement or calibration accuracy. This paper discusses the reconstruction algorithms for self-referenced measurement and connects lateral shearing interferometry and multi-probe error separation. In lateral shearing interferometry, the reconstruction algorithms are generally categorized into modal or zonal methods. The multi-probe error separation techniques for straightness measurement are broadly divided into two-point and three-point methods. The common features of the lateral shearing interferometry method and the multi-probe error separation method are identified. We conclude that the reconstruction principle in lateral shearing interferometry is similar to the two-point method in error separation on the condition that no yaw error exists. This similarity may provide a basis or inspiration for the development of both classes of methods.

关键词： self-referenced measurement lateral shearing interferometry multi-probe error separation surface metrology

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Micro-spectrophotometer based on micro electro-mechanical systems technology

ZHOU Lianqun, LI Zhenggang, WU Yihui, ZHANG Ping, XUAN Ming, JIA Hongguang

《机械工程前沿（英文）》 2008年第3卷第1期页码 37-43 doi: 10.1007/s11465-008-0001-x

摘要： A new mini-spectrophotometer is developed by adopting micro-silicon-slit and micro-silicon-fixer, which are based on micro electro-mechanical systems (MEMS) technology. Both the micro-silicon-slit and the micro-silicon-fixer have their own features, such as small volume and high precision, which are laid out and analyzed later. Meantime, through the analysis of the sample cell’s optical characteristics that have some impacts on the linearity of the spectrophotometer, a relationship equation, which is about the impact of the refractive index of the sample cell and the tested medium on the variety of the transmitted light intensity and the absorbency, is put forward. When the water and the air are taken as the referenced medium, the experiments demonstrate that the difference of the refractive index of the references does not influence the correlation coefficient and the slope of the absorbency-concentration curve. The final results show that the new mini-spectrophotometer with micro-silicon-slit and micro-silicon-fixer is worked out, its correlation coefficient > 0.999, and its refractive index resolving power is better than 0.01.

关键词： mini-spectrophotometer referenced micro-silicon-fixer electro-mechanical correlation coefficient