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Preload characteristics identification of the piezoelectric-actuated 1-DOF compliant nanopositioning
Ruizhou WANG, Xianmin ZHANG
《机械工程前沿(英文)》 2015年 第10卷 第1期 页码 20-36 doi: 10.1007/s11465-015-0328-z
Packaged piezoelectric ceramic actuators (PPCAs) and compliant mechanisms are attractive for nanopositioning and nanomanipulation due to their ultra-high precision. The way to create and keep a proper and steady connection between both ends of the PPCA and the compliant mechanism is an essential step to achieve such a high accuracy. The connection status affects the initial position of the terminal moving plate, the positioning accuracy and the dynamic performance of the nanopositioning platform, especially during a long-time or high-frequency positioning procedure. This paper presents a novel external preload mechanism and tests it in a 1-degree of freedom (1-DOF) compliant nanopositioning platform. The 1-DOF platform utilizes a parallelogram guiding mechanism and a parallelogram load mechanism to provide a more accurate actual input displacement and output displacement. The simulation results verify the proposed stiffness model and dynamic model of the platform. The values of the preload displacement, actual input displacement and output displacement can be measured by three capacitive sensors during the whole positioning procedure. The test results show the preload characteristics vary with different types or control modes of the PPCA. Some fitting formulas are derived to describe the preload displacement, actual input displacement and output displacement using the nominal elongation signal of the PPCA. With the identification of the preload characteristics, the actual and comprehensive output characteristics of the PPCA can be obtained by the strain gauge sensor (SGS) embedded in the PPCA.
关键词: nanopositioning preload characteristic packaged piezoelectric ceramic actuator compliant mechanism
Ye GAO, Wei SUN
《机械工程前沿(英文)》 2019年 第14卷 第3期 页码 358-368 doi: 10.1007/s11465-019-0539-9
关键词: inverse identification pipeline hoop frequency response function mechanical parameters preload
标题 作者 时间 类型 操作
Preload characteristics identification of the piezoelectric-actuated 1-DOF compliant nanopositioning
Ruizhou WANG, Xianmin ZHANG
期刊论文